Title:
CERAMIC JOINED BODY, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR MANUFACTURING CERAMIC JOINED BODY
Document Type and Number:
WIPO Patent Application WO/2023/145552
Kind Code:
A1
Abstract:
This ceramic joined body comprises: a pair of ceramic plates; an electrode layer interposed between the pair of ceramic plates; and a joining layer that is disposed between the pair of ceramic plates and at the perimeter of the electrode layer. The joining layer and at least one of the pair of ceramic plates is formed from a composite of an insulative material and an electroconductive material. A gap is provided between an outer border of the electrode layer and an inner border of the joining layer. The content ratio of the electroconductive material in the joining layer and the at least one of the pair of ceramic plates is 3-12% by mass.
Inventors:
ARIKAWA JUN (JP)
HIDAKA NOBUHIRO (JP)
MIURA YUKIO (JP)
MAETA SHINICHI (JP)
HIDAKA NOBUHIRO (JP)
MIURA YUKIO (JP)
MAETA SHINICHI (JP)
Application Number:
PCT/JP2023/001264
Publication Date:
August 03, 2023
Filing Date:
January 18, 2023
Export Citation:
Assignee:
SUMITOMO OSAKA CEMENT CO LTD (JP)
International Classes:
H01L21/683; C04B37/00
Foreign References:
| JP2005093919A | 2005-04-07 | |||
| JP2021125488A | 2021-08-30 | |||
| JP2018022873A | 2018-02-08 | |||
| JP2001085505A | 2001-03-30 | |||
| JP2013258429A | 2013-12-26 | |||
| US7580238B2 | 2009-08-25 |
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
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