Title:
CERAMIC, PROBE-GUIDING PART, PROBE CARD AND SOCKET FOR INSPECTING PACKAGE
Document Type and Number:
WIPO Patent Application WO/2021/206148
Kind Code:
A1
Abstract:
This ceramic contains, by mass%: 20.0-60.0% of Si3N4; 25.0-70.0% of ZrO2; 2.0-17.0% of at least one selected from SiC and AlN (where AlN is 10.0% or less); and 5.0-15.0% of at least one selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO, and V2O5, wherein Fn calculated from equation (1) below is 0.02-0.40. This ceramic can be subjected to a highly efficient laser processing. Fn=(SiC＋3AlN)/(Si3N4＋ZrO2)・・・ (1)
Inventors:
YAMAGISHI WATARU (JP)
MORI KAZUMASA (JP)
ETO SHUNICHI (JP)
MORI KAZUMASA (JP)
ETO SHUNICHI (JP)
Application Number:
PCT/JP2021/014925
Publication Date:
October 14, 2021
Filing Date:
April 08, 2021
Export Citation:
Assignee:
FERROTEC MATERIAL TECH CORPORATION (JP)
International Classes:
C04B35/488; C04B35/596; G01R1/073
Domestic Patent References:
| WO2019078364A1 | 2019-04-25 | |||
| WO2019093370A1 | 2019-05-16 | |||
| WO2019093370A1 | 2019-05-16 |
Foreign References:
| JPS6433072A | 1989-02-02 | |||
| JP2010180105A | 2010-08-19 | |||
| JPS645975A | 1989-01-10 | |||
| JPS6168374A | 1986-04-08 | |||
| JP2005119941A | 2005-05-12 | |||
| JP2001354480A | 2001-12-25 | |||
| JP2003286076A | 2003-10-07 |
Other References:
TAKESHI YOSHIDA ET AL.: "Production Machining / Machine Tool Division Supporters Association", 21 November 2001, JAPAN SOCIETY OF MECHANICAL ENGINEERS, article "Machining Characteristics of Ceramics in YAG Laser Irradiation, Academic Lecture 2001 of Production and Machining"
See also references of EP 4129953A4
See also references of EP 4129953A4
Attorney, Agent or Firm:
BRIGHTAS IP ATTORNEYS (JP)
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