Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
CERAMIC STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2022/024906
Kind Code:
A1
Abstract:
A ceramic structure according to the present disclosure contains silicon carbide, silicon carbonitride, titanium carbide, or titanium carbonitride as the main component, and has a first main surface and a second main surface that is opposite to the first main surface. The carbon concentration, as determined by element mapping using an electron beam microanalyzer, is higher at the first main surface than at the second main surface.

Inventors:
HAMASHIMA HIROSHI (JP)
Application Number:
PCT/JP2021/027273
Publication Date:
February 03, 2022
Filing Date:
July 21, 2021
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
KYOCERA CORP (JP)
International Classes:
C04B35/56; C04B35/565; C04B35/58; H01B5/16; H01L21/67
Domestic Patent References:
WO2019074843A12019-04-18
Foreign References:
JP2001223256A2001-08-17
Attorney, Agent or Firm:
BUNA PATENT ATTORNEYS (JP)
Download PDF: