Title:
CERAMIC SUSCEPTOR
Document Type and Number:
WIPO Patent Application WO/2023/027525
Kind Code:
A1
Abstract:
The present invention relates to a ceramic susceptor. The ceramic susceptor of the present invention comprises a ceramic plate on which a radio frequency electrode is arranged, wherein the ceramic plate comprises a connector connected to the radio frequency electrode and comprises an electrode rod having one end connected to the connector so as to supply electric power to the radio frequency electrode, and the electrode rod uses Mo, W or an alloy thereof as a base material and comprises a metal nitride film on the surface of the base material.
Inventors:
ROH IM-JUN (KR)
PARK MYOUNG HA (KR)
KIM TAEK GON (KR)
PARK MYOUNG HA (KR)
KIM TAEK GON (KR)
Application Number:
PCT/KR2022/012738
Publication Date:
March 02, 2023
Filing Date:
August 25, 2022
Export Citation:
Assignee:
MICO CERAM LTD (KR)
International Classes:
H01L21/683; B23Q3/15; C23C16/458; H01J37/32; H01L21/687; H02N13/00
Foreign References:
| KR20130059764A | 2013-06-07 | |||
| JPH08306629A | 1996-11-22 | |||
| KR20140132520A | 2014-11-18 | |||
| JP2003188248A | 2003-07-04 | |||
| KR20140142548A | 2014-12-12 |
Attorney, Agent or Firm:
HMP IP GROUP (KR)
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