CHARGED PARTICLE BEAM DEVICE AND METHOD FOR CONTROLLING CHARGED PARTICLE BEAM DEVICE

Title:

CHARGED PARTICLE BEAM DEVICE AND METHOD FOR CONTROLLING CHARGED PARTICLE BEAM DEVICE

Document Type and Number:

WIPO Patent Application WO/2020/235091

Kind Code:

A1

Abstract:

This charged particle beam device comprises: a moving mechanism; a particle source; an optical element; a detector; and a control mechanism that controls the moving mechanism, the particle source, the optical element, and the detector on the basis of observation conditions. The control mechanism acquires, as a comparison image, an image of a diffraction pattern including a plurality of Kikuchi lines after the moving mechanism has been inclined by a first angle, evaluates the error between the inclination angle of the sample and a target inclination angle using a reference image of the reference diffraction pattern and the comparison image, and adjusts the inclination of the moving mechanism on the basis of the evaluation result.

Inventors:

DOBASHI TAKASHI (JP)
TAMAKI HIROKAZU (JP)
MISE HIROMI (JP)
ITO SHUNTARO (JP)

Application Number:

PCT/JP2019/020503

Publication Date:

November 26, 2020

Filing Date:

May 23, 2019

Export Citation:

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Assignee:

HITACHI HIGH TECH CORP (JP)

International Classes:

H01J37/20

Domestic Patent References:

WO2018221636A1	2018-12-06
WO2016084872A1	2016-06-02

Foreign References:

JPH076725A	1995-01-10
JP2010092625A	2010-04-22
JP2009110734A	2009-05-21
JPH08106873A	1996-04-23
JP2018092805A	2018-06-14
US20170309441A1	2017-10-26