Title:
CHARGED PARTICLE BEAM DEVICE AND METHOD FOR CONTROLLING SAME
Document Type and Number:
WIPO Patent Application WO/2022/269925
Kind Code:
A1
Abstract:
Provided is a charged particle beam device that makes it possible to perform a high-speed autofocus operation which reduces damage to a sample by eliminating the need for a focus sweep operation or reducing the number of focus sweep operations. A charged particle beam device according to the present invention comprises: a charged particle beam optical system that converges/polarizes a charged particle beam and irradiates a sample with the charged particle beam; an image generation processing unit that generates an image of the sample by detecting the charged particle beam; a storage unit that stores a relation between the focus position of the charged particle beam by the charged particle beam optical system and a feature of the image of the sample; a comparison operation unit that determines the shift amount and the shift direction of the focus position of the charged particle beam by comparing information obtained from the image generated by the image generation processing unit and information in the storage unit; and a control unit that controls the charged particle beam optical system according to a comparison result of the comparison operation unit.
Inventors:
KURODA KOICHI (JP)
Application Number:
PCT/JP2021/024213
Publication Date:
December 29, 2022
Filing Date:
June 25, 2021
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/21; H01J37/22
Foreign References:
| JP2020187980A | 2020-11-19 | |||
| JP2012009289A | 2012-01-12 | |||
| JP2000340154A | 2000-12-08 |
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
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