Title:
CHARGED PARTICLE BEAM DEVICE AND METHOD FOR CONTROLLING CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/084772
Kind Code:
A1
Abstract:
This charged particle beam device, which is for processing a sample, comprises: a charged particle beam–emitting optical system that emits a charged particle beam; a sample stage that holds a sample; a drive mechanism that drives the sample stage; and a computer that sets a cross-section of the sample in a processing region of the sample and controls the charged particle beam–emitting optical system and the drive mechanism when slicing the set processing region. The computer sets an irradiation position in a position where each of a plurality of emitted charged particle beams overlap in a first direction of the sample processing region when slicing the processing region.
Inventors:
TORIKAWA SHOTA (JP)
YAMAMOTO YO (JP)
YAMAMOTO YO (JP)
Application Number:
PCT/JP2021/041907
Publication Date:
May 19, 2023
Filing Date:
November 15, 2021
Export Citation:
Assignee:
HITACHI HIGH TECH SCIENCE CORP (JP)
International Classes:
H01J37/305
Foreign References:
| JP2007177321A | 2007-07-12 | |||
| JPH09259810A | 1997-10-03 | |||
| JP2020064780A | 2020-04-23 |
Attorney, Agent or Firm:
TAZAKI Akira et al. (JP)
Download PDF: