Title:
CHARGED PARTICLE BEAM DEVICE, OBSERVATION CONDITION SETTING METHOD, AND PROGRAM
Document Type and Number:
WIPO Patent Application WO/2023/238193
Kind Code:
A1
Abstract:
A charged particle beam device, which observes a sample by periodically irradiating the sample with a pulsed charged particle beam, comprises a control device that controls the irradiation of the pulsed charged particle beam and the detection of a signal of emitted electrons on the basis of observation conditions. The control device calculates the irradiation period, scanning speed, and pulse width of the pulsed charged particle beam and the detection timing of the signal of emitted electrons on the basis of the current of the charged particle beam emitted from a particle source, and the capacitance and electrical resistance of the sample, and sets observation conditions including the current of the charged particle beam, the irradiation period, scanning speed, and pulse width of the pulsed charged particle beam, and the detection timing of the emitted electron signal.
Inventors:
OTSUGA KAZUO (JP)
KIMIZUKA HEITA (JP)
SAKAKIBARA MAKOTO (JP)
KIMIZUKA HEITA (JP)
SAKAKIBARA MAKOTO (JP)
Application Number:
PCT/JP2022/022795
Publication Date:
December 14, 2023
Filing Date:
June 06, 2022
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/22; H01J37/28
Foreign References:
| JP2018137160A | 2018-08-30 | |||
| JP2021027272A | 2021-02-22 | |||
| JP2021039826A | 2021-03-11 |
Attorney, Agent or Firm:
TOU-OU PATENT FIRM (JP)
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