Title:
CHARGED PARTICLE BEAM DEVICE AND SAMPLE OBSERVATION METHOD FOR CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/151809
Kind Code:
A1
Abstract:
The charged particle beam device comprises: an electron gun for generating an electron beam; an imaging lens system for imaging the electron beam that has passed through a sample; a splitting portion (6) where the electron beam that has passed through the imaging lens system is split into a first image component and a second image component; a first image detection unit (7) for detecting the first image component and outputting a first image (32); a second image detection unit (9) for detecting the second image component and outputting a second image (33); a processing unit; and display units (14, 15). The magnification for the second image (33) is greater than the magnification for the first image (32). The processing unit generates a third image (36) by combining the first image (32) and the second image (33), and the display units (14, 15) display the second image (33) and the third image (36).
More Like This:
Inventors:
KUBO TAKASHI (JP)
Application Number:
PCT/JP2015/059186
Publication Date:
September 29, 2016
Filing Date:
March 25, 2015
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/22; H01J37/244; H01J37/26
Foreign References:
| JPH0562630A | 1993-03-12 | |||
| JP2002279926A | 2002-09-27 | |||
| JPH07262950A | 1995-10-13 | |||
| JP2007073211A | 2007-03-22 | |||
| JPH11154480A | 1999-06-08 | |||
| US5517033A | 1996-05-14 |
Attorney, Agent or Firm:
HIRAKI Yusuke et al. (JP)
Yusuke Hiraki (JP)
Yusuke Hiraki (JP)
Download PDF: