Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2012/172720
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a charged particle beam device meant to improve the energy resolution of an energy filter. As one embodiment for achieving this purpose, proposed is a charged particle beam device provided with a deflector that deflects charged particles emitted from a sample toward an energy filter, wherein the change in the luminance value obtained when the voltage applied to the energy filter is changed is determined for each of a plurality of deflection conditions for the deflector, and the deflection condition in which such change in luminance value satisfies prescribed conditions is set as the deflection condition for the deflector.
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Inventors:
SASAKI YUKO (JP)
ITO HIROYUKI (JP)
ITO HIROYUKI (JP)
Application Number:
PCT/JP2012/002606
Publication Date:
December 20, 2012
Filing Date:
April 16, 2012
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
SASAKI YUKO (JP)
ITO HIROYUKI (JP)
SASAKI YUKO (JP)
ITO HIROYUKI (JP)
International Classes:
H01J37/05; H01J37/147; H01J37/22; H01J37/28; H01J37/29
Foreign References:
| JP2002524827A | 2002-08-06 | |||
| JP2001357808A | 2001-12-26 | |||
| JP2012003902A | 2012-01-05 |
Attorney, Agent or Firm:
INOUE, Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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Claims: