Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/194575
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a charged particle beam device that can increase the contrast of an observation image of a sample as much as possible according to light absorption characteristics that are changed for each optical parameter. The charged particle beam device according to the present invention changes an optical parameter such as a polarization plane of light with which the sample is irradiated, and generates the observation image having a contrast corresponding to the changed optical parameter. Furthermore, the optical parameter that maximizes the light absorption coefficient of the sample is specified according to a feature amount of the shape pattern of the sample (see FIG. 5).
Inventors:
SHOUJI MINAMI (JP)
TSUNO NATSUKI (JP)
OHTA HIROYA (JP)
BIZEN DAISUKE (JP)
TSUNO NATSUKI (JP)
OHTA HIROYA (JP)
BIZEN DAISUKE (JP)
Application Number:
PCT/JP2019/013177
Publication Date:
October 01, 2020
Filing Date:
March 27, 2019
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/22; H01J37/28
Domestic Patent References:
| WO2010052854A1 | 2010-05-14 |
Foreign References:
| JP2005512339A | 2005-04-28 | |||
| JP2014032833A | 2014-02-20 | |||
| JP2007132836A | 2007-05-31 | |||
| US20170018403A1 | 2017-01-19 | |||
| US20180364564A1 | 2018-12-20 |
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
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