Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/127083
Kind Code:
A1
Abstract:
A charged particle beam device according to the present invention comprises: an inclining mechanism driving unit that generates driving force; an incline driving force transmission unit that transmits said driving force; and an inclining mechanism part that carries out an inclining action. The inclining mechanism part is provided with: a first load transmission unit and second load transmission unit; a first deformation part, second deformation part, third deformation part, and fourth deformation part; and a sample-holding part that can be inclined. The first load transmission unit moves in a load direction due to a load from the incline driving force transmission unit, and conveys the load to the first deformation part. The second load transmission unit is rotated, about the second deformation part as a fulcrum, by torque generated by deformation of the first deformation part, and conveys the load to the third deformation part. The sample-holding part is rotated, in a direction opposite to that of the second load transmission unit and about the fourth deformation part as a fulcrum, by torque generated by deformation of the third deformation part.
Inventors:
ENOMOTO HIROHISA (JP)
NISHINAKA KENICHI (JP)
NISHINAKA KENICHI (JP)
Application Number:
PCT/JP2021/048759
Publication Date:
July 06, 2023
Filing Date:
December 28, 2021
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/20
Domestic Patent References:
| WO1996020495A2 | 1996-07-04 |
Foreign References:
| JP2015220057A | 2015-12-07 | |||
| JPH07262955A | 1995-10-13 | |||
| JPS5014268A | 1975-02-14 | |||
| JPS61116062U | 1986-07-22 | |||
| JPS53113057U | 1978-09-08 | |||
| CN204558415U | 2015-08-12 |
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
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