Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/276127
Kind Code:
A1
Abstract:
The present disclosure provides a charged particle beam device capable of removal or control of an electric charge by plasma without affecting control of the charged particle beam. The charged particle beam device according to the present disclosure is provided with a charged particle beam optical system for emitting a charged particle beam onto a sample, a sample chamber provided with a stage on which the sample is placed, a plasma generating device for generating plasma to be emitted onto the stage so as to remove an electrification charge from the sample, and a coupling member coupling the plasma generating device to the sample chamber, the coupling member including an insulating spacer insulating the sample chamber and the plasma generating device.
Inventors:
KOTSUJI HIDEYUKI (JP)
YOKOSUKA TOSHIYUKI (JP)
KAWANO HAJIME (JP)
YOKOSUKA TOSHIYUKI (JP)
KAWANO HAJIME (JP)
Application Number:
PCT/JP2021/025045
Publication Date:
January 05, 2023
Filing Date:
July 01, 2021
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/20
Foreign References:
| JP2007080784A | 2007-03-29 | |||
| JP2002324511A | 2002-11-08 | |||
| JP2007149449A | 2007-06-14 | |||
| JP2012155980A | 2012-08-16 |
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
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