CHARGED-PARTICLE BEAM SYSTEM

WIPO Patent Application WO/2018/179029

A1

This charged-particle beam system comprises: a charged-particle beam device containing a detection unit for detecting electrons generated by irradiating a sample with a charged-particle beam released from a charged particle source; and a signal detection unit in which a detection signal from the detection unit is input through a wiring. The signal detection unit comprises: a separation unit for separating into a rising signal and a falling signal the detection signal from the detection unit; a falling signal processing unit for at least eliminating ringing in the falling signal; and a combination unit generating and delivering a combined signal produced by combining the rising signal, which has been separated by the separation unit, with the falling signal wherefrom the ringing has been eliminating by the falling signal processing unit.

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YAMAMOTO AKIO (JP)
IKEDA KAZUKI (JP)
LI WEN (JP)
TAKAHASHI HIROYUKI (JP)
HOQUE SHAHEDUL (JP)
MIZUTANI SHUNSUKE (JP)

PCT/JP2017/012250

October 04, 2018

March 27, 2017

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HITACHI HIGH TECH CORP (JP)

H01J37/244; H01J37/22; H01J37/28

JPH07245076A	1995-09-19
JP2013246096A	2013-12-09

SEIRYO I.P.C. (JP)

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