Title:
CHARGED PARTICLE DETECTOR
Document Type and Number:
WIPO Patent Application WO/2017/002936
Kind Code:
A1
Abstract:
A charged particle detector (1) according to an embodiment of the present invention is provided, in a configuration in which a micro channel plate (MCP) (10) having a bias angle and a PD (80) are combined, with the MCP and the PD disposed sandwiching a focus electrode (60) in order to improve response characteristics compared to the prior art. The MCP has a plurality of through holes, each having been inclined by a bias angle θ, and the PD is arranged eccentrically such that the center of an electron incident surface deviates by a prescribed distance along the bias angle direction S3 with respect to the central axis (AX1) of the MCP.
Inventors:
SUYAMA MOTOHIRO (JP)
KOBAYASHI HIROSHI (JP)
HATTORI SHINYA (JP)
KOBAYASHI HIROSHI (JP)
HATTORI SHINYA (JP)
Application Number:
PCT/JP2016/069496
Publication Date:
January 05, 2017
Filing Date:
June 30, 2016
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
H01J49/06; H01J43/24
Foreign References:
| JP2007535104A | 2007-11-29 | |||
| JP2011129362A | 2011-06-30 | |||
| JPH0773847A | 1995-03-17 | |||
| JP2014078388A | 2014-05-01 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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