Title:
CHARGED PARTICLE GUN AND CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/031399
Kind Code:
A1
Abstract:
Provided are a charged particle gun and a charged particle beam device in which the vibration of an electron source is reduced and which have a small machine difference in vibration resistance performance. The charged particle gun of the present disclosure is provided with: a charged particle source that emits a charged particle beam; a cylinder to which the charged particle source is fixed; a fixing component that is fitted into the cylinder and is movable in a perpendicular direction; a chassis having an opening into which the cylinder can be inserted and a support portion that supports the fixing component; a first support component and a second support component that are disposed between the fixing component and the support portion; and a push-in component that moves the cylinder downwards by being pressed against the fixing component. The charged particle gun is characterized in that the second support component is compressively deformed in the perpendicular direction and is larger than the first support component in the perpendicular direction.
Inventors:
ENOMOTO HIROHISA (JP)
KANEDA MINORU (JP)
SATO SHUNSUKE (JP)
SUZUKI WATARU (JP)
KANEDA MINORU (JP)
SATO SHUNSUKE (JP)
SUZUKI WATARU (JP)
Application Number:
PCT/JP2018/043468
Publication Date:
February 13, 2020
Filing Date:
November 27, 2018
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/06; H01J37/04; H01J37/065
Foreign References:
| JPH1092363A | 1998-04-10 |
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
Download PDF: