Title:
CHEMICAL MECHANICAL MACHINING AND SURFACE FINISHING
Document Type and Number:
WIPO Patent Application WO2002062528
Kind Code:
A3
Abstract:
The invention described herein discloses a chemical mechanical machining and surface finishing process. A conversion coating is formed on the surface of a workpiece and is removed via relative motion with a tool, thereby exposing the workpiece to further reaction with the active chemistry. Low mechanical forces are used such that the plastic deformation, shear strength, tensile strength and/or thermal degradation temperature of the workpiece are not exceeded. Since the chemical mechanical machining and surface finishing process requires little force and/or speed of contact to remove the conversion coating, the equipment's mass, complexity and cost can be significantly reduced, while simultaneously increasing machining precision and accuracy. The present invention lends itself to a very controlled rate of metal removal, and can simply surface finish the workpiece, or if desired, can surface finish the workpiece simultaneously with the shaping and/or sizing process.
Inventors:
MICHAUD MARK D
SROKA GARY
WINKELMANN LANE WILLIAM
SROKA GARY
WINKELMANN LANE WILLIAM
Application Number:
PCT/US2002/003694
Publication Date:
February 27, 2003
Filing Date:
February 07, 2002
Export Citation:
Assignee:
REM CHEMICALS INC (US)
International Classes:
B23F19/00; B24B1/00; B24B5/42; B24B19/06; B24B33/00; B23C3/00; B24B37/00; B24B37/04; C23C22/07; C23C22/24; C23C22/46; C23C22/47; C23C22/73; C23F3/00; (IPC1-7): B24B37/04; C23F1/02; B24B37/00; B24B19/02; B24B19/06
Foreign References:
| EP0657658A1 | 1995-06-14 | |||
| EP1046456A1 | 2000-10-25 |
Download PDF:
Previous Patent: ABRASIVE ARTICLE SUITABLE FOR MODIFYING A SEMICONDUCTOR WAFER
Next Patent: CENTRIFUGAL WHEEL SYSTEM
Next Patent: CENTRIFUGAL WHEEL SYSTEM