Title:
CHEMICAL MECHANICAL PLANARIZATION APPARATUS AND WAFER TRANSFER METHOD
Document Type and Number:
WIPO Patent Application WO/2024/002312
Kind Code:
A1
Abstract:
Disclosed in the present invention is a chemical mechanical planarization apparatus, comprising: a polishing module, a cleaning module, and a cleaning input module, which is arranged respectively adjacent to the polishing module and the cleaning module, and comprises a wafer transfer device. The wafer transfer device has at least a first operating state and a second operating state, wherein in the first operating state, the wafer transfer device receives a wafer conveyed by the polishing module, and the wafer is in a horizontal state or tends to be in the horizontal state; and in the second operating state, the wafer transfer device directly turns over the wafer, which is in the horizontal state or tends to be in the horizontal state, to be in a vertical state. Further disclosed in the present invention is a wafer transfer method. In the present invention, wafer transfer between the polishing module and the cleaning module is implemented by means of the wafer transfer device, which integrates the structures of the parts of a manipulator and an intermediate transfer table, thereby omitting the step of performing intermediate transfer by means of a manipulator in a humid environment, and thus reducing intermediate transfer links, simplifying the transfer structure, and realizing a higher transfer efficiency. The present invention has a simple structure, is less prone to breakdown, and has a high transfer efficiency.
Inventors:
ZHU ZHENGTING (CN)
Application Number:
PCT/CN2023/104374
Publication Date:
January 04, 2024
Filing Date:
June 30, 2023
Export Citation:
Assignee:
HANGZHOU SIZONE ELECTRONIC TECH INC (CN)
International Classes:
B24B37/34; H01L21/304; H01L21/677
Foreign References:
| US20100078044A1 | 2010-04-01 | |||
| CN206500996U | 2017-09-19 | |||
| KR20160122953A | 2016-10-25 | |||
| CN218226091U | 2023-01-06 | |||
| CN113241322A | 2021-08-10 | |||
| CN109148341A | 2019-01-04 | |||
| TW202205503A | 2022-02-01 |
Attorney, Agent or Firm:
HANGZHOU KAIZHI PATENT AGENCY (GENERAL PARTNERSHIP) (CN)
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