Title:
CHEMICAL VAPOR DEPOSITION STARTING MATERIAL COMPRISING HETEROGENEOUS POLYNUCLEAR COMPLEX, AND CHEMICAL VAPOR DEPOSITION METHOD USING SAID CHEMICAL VAPOR DEPOSITION STARTING MATERIAL
Document Type and Number:
WIPO Patent Application WO/2016/181917
Kind Code:
A1
Abstract:
The present invention relates to a chemical vapor deposition starting material represented below that comprises a heterogeneous polynuclear complex in which at least a diimine and carbonyl are coordinated, as ligands, to a first transition metal and second transition metal which are central metals. The first transition metal (M1) and second transition metal (M2) are different from each other. There are 1-2 diimines (L), inclusive, to which substituent groups R1-R4 which are each either hydrogen atoms or C1-5 alkyl groups are coordinated. The chemical vapor deposition starting material of the present invention makes it possible, using a single starting material, to form a composite metal thin film or composite metal compound thin film including a plurality of metals.
Inventors:
HARADA RYOSUKE (JP)
SHIGETOMI TOSHIYUKI (JP)
NABEYA SHUNICHI (JP)
SUZUKI KAZUHARU (JP)
KUMAKURA AKIKO (JP)
AOYAMA TATSUTAKA (JP)
SONE TAKAYUKI (JP)
SHIGETOMI TOSHIYUKI (JP)
NABEYA SHUNICHI (JP)
SUZUKI KAZUHARU (JP)
KUMAKURA AKIKO (JP)
AOYAMA TATSUTAKA (JP)
SONE TAKAYUKI (JP)
Application Number:
PCT/JP2016/063694
Publication Date:
November 17, 2016
Filing Date:
May 09, 2016
Export Citation:
Assignee:
TANAKA PRECIOUS METAL IND (JP)
International Classes:
C23C16/18; C07C251/08; C07F13/00; C07F15/00; C07F15/06; C07F19/00; H01L21/285; H01L21/31
Other References:
AARNTS,M.P. ET AL.: "Syntheses, structures and spectroscopic properties of novel inorganometallic complexes Ru (E) (E') (CO) (iPrDAB)(E=Cl, E'=SnPh3, PbPh3; E=Me, E'=SnPh3, PbPh3; E=SnPh3, E' =SnPh3, SnMe3, GePh3; E=PbPh3, E'=PbPh3,PbMe3,GePh3;iPr-DAB=N,N'-diisopropyl- 1,4-diaza-1,3-butadiene", INORGANICA CHIMICA ACTA, vol. 256, 1997, pages 93 - 105, XP055328905
AARNTS,M.P. ET AL.: "Photochemical bond homolysis in a novel series of metal-metal bonded complexes Ru(E) (E') (CO)2(iPr-DAB", INORGANICA CHIMICA ACTA, vol. 266, 1997, pages 37 - 46, XP055328907
SLAGEREN,JOIS VAN ET AL.: "Influence of the variation of the co-ligands on the electronic transitions and emission properties of [Pt (I) ( CH 3)3(iPr-DAB)], [Pt ( CH 3) 4 (alpha-diimine) ] and [Pt(SnPh3)2( CH 3)2(iPr-DAB)]: an experimental and theoretical study", J.CHEM.SOC., DALTON TRANS., 2002, pages 218 - 225, XP055328914
See also references of EP 3296426A4
AARNTS,M.P. ET AL.: "Photochemical bond homolysis in a novel series of metal-metal bonded complexes Ru(E) (E') (CO)2(iPr-DAB", INORGANICA CHIMICA ACTA, vol. 266, 1997, pages 37 - 46, XP055328907
SLAGEREN,JOIS VAN ET AL.: "Influence of the variation of the co-ligands on the electronic transitions and emission properties of [Pt (I) ( CH 3)3(iPr-DAB)], [Pt ( CH 3) 4 (alpha-diimine) ] and [Pt(SnPh3)2( CH 3)2(iPr-DAB)]: an experimental and theoretical study", J.CHEM.SOC., DALTON TRANS., 2002, pages 218 - 225, XP055328914
See also references of EP 3296426A4
Attorney, Agent or Firm:
TANAKA AND OKAZAKI (JP)
Patent business corporation Tanaka and Okazaki and associates (JP)
Patent business corporation Tanaka and Okazaki and associates (JP)
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