Title:
CHIP RESISTOR AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2022/075238
Kind Code:
A1
Abstract:
An objective of the present disclosure is to achieve both high resistivity and low temperature coefficient of resistance (TCR). A chip resistor (10) comprises an insulating substrate (1), a resistor (2), and an electrode. The resistor (2) includes Cr, Si and N and is provided on the insulating substrate (1). The electrode includes at least one refractory metal and is provided on the resistor (2). The atomic ratio of Si to Cr in the resistor (2) is 2/3 to 4 at least at the center of the resistor (2) in the film thickness direction (D1) of the resistor (2). The atomic percentage of N in the resistor (2) is 50 atom% or less at least at the center of the resistor (2) in the film thickness direction (D1).
Inventors:
SUETSUGU DAISUKE
NOGUCHI NORIMICHI
URAKAWA TATSUYA
ODA HIROKI
UEYAMA DAISUKE
NOGUCHI NORIMICHI
URAKAWA TATSUYA
ODA HIROKI
UEYAMA DAISUKE
Application Number:
PCT/JP2021/036549
Publication Date:
April 14, 2022
Filing Date:
October 04, 2021
Export Citation:
Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
H01C13/00; H01C7/00; H01C17/00; H01C17/12
Foreign References:
| JPH08264304A | 1996-10-11 | |||
| JPH05347202A | 1993-12-27 | |||
| JPH10144501A | 1998-05-29 |
Attorney, Agent or Firm:
HOKUTO PATENT ATTORNEYS OFFICE (JP)
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