Title:
CLAMPING APPARATUS, MANIPULATOR, AND MECHANICAL APPARATUS
Document Type and Number:
WIPO Patent Application WO/2024/060277
Kind Code:
A1
Abstract:
The present application relates to a clamping apparatus, a manipulator, and a mechanical apparatus, which are used for clamping at least one of a wafer box and a wafer boat. The clamping apparatus comprises a carrying member and a clamping assembly. The carrying member has a predetermined length, width, and thickness. The clamping assembly is disposed on the carrying member. The clamping assembly comprises clamping members that are arranged in pairs and are distributed opposite one another in the length direction of the carrying member. Each clamping member is connected to the carrying member. Each clamping member comprises a first clamping portion and a second clamping portion which are intersectingly disposed, the first clamping portion being provided with a first groove recessed in the length direction, and the second clamping portion being provided with a second groove recessed in the thickness direction of the carrying member. The first grooves of the clamping members arranged in pairs are distributed opposite to one another and jointly clamp the wafer box, and the second grooves of the clamping members arranged in pairs are distributed opposite to one another and jointly clamp the wafer boat. The present solution can implement clamping of a wafer box or wafer boat, and improve carrying efficiency.
Inventors:
CHEN DINGCAO (CN)
PEI DAFEI (CN)
JIANG XIAOEN (CN)
WANG CHONGLIN (CN)
PEI DAFEI (CN)
JIANG XIAOEN (CN)
WANG CHONGLIN (CN)
Application Number:
PCT/CN2022/121882
Publication Date:
March 28, 2024
Filing Date:
September 27, 2022
Export Citation:
Assignee:
TAIWAN SEMICONDUCTOR MFG CO LTD (CN)
TSMC CHINA COMPANY LTD (CN)
TSMC CHINA COMPANY LTD (CN)
International Classes:
H01L21/68; H01L21/687
Foreign References:
| CN213212139U | 2021-05-14 | |||
| CN1105309A | 1995-07-19 | |||
| CN114906529A | 2022-08-16 | |||
| CN216189096U | 2022-04-05 | |||
| CN114613707A | 2022-06-10 | |||
| JPH09162265A | 1997-06-20 | |||
| JPH0846009A | 1996-02-16 |
Attorney, Agent or Firm:
BEIJING EAST IP LTD. (CN)
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