Title:
CLAMPING JIG AND CLEANING DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/127796
Kind Code:
A1
Abstract:
A clamping jig according to the present disclosure comprises: a support column part; a holding part which is positioned at one end of the support column part for the purpose of holding the outer peripheral part of a substrate; and a base part which is positioned at the other end of the support column part for the purpose of supporting the support column part. The holding part comprises: a main body which is formed of a ceramic that is mainly composed of silicon carbide or zirconium oxide; and a first thermal insulation layer which is positioned at the front end of the main body and has a thermal conductivity that is lower than the thermal conductivity of the main body.
Inventors:
HAMASHIMA HIROSHI (JP)
Application Number:
PCT/JP2022/047919
Publication Date:
July 06, 2023
Filing Date:
December 26, 2022
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H01L21/304; H01L21/677
Foreign References:
| JP2014241390A | 2014-12-25 | |||
| JP2019161022A | 2019-09-19 | |||
| JPH1140656A | 1999-02-12 | |||
| JPH10199964A | 1998-07-31 | |||
| US20070094885A1 | 2007-05-03 | |||
| US20070145231A1 | 2007-06-28 |
Attorney, Agent or Firm:
BUNA PATENT ATTORNEYS (JP)
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