Title:
CLEAN UNIT, CLEAN UNIT SYSTEM, FUNCTIONAL UNIT, FUNCTIONAL UNIT SYSTEM, MATERIAL TREATMENT METHOD, ELEMENT MANUFACTURING METHOD, CELL LINE CULTURING METHOD, AND PLANT BODY CULTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2004/114378
Kind Code:
A1
Abstract:
A clean unit system formed by connecting, to each other, a plurality of clean units in which connection parts are installed at at least one of the rear part, upper part, and lower part and at least one of the side parts thereof of a working chamber allowed to maintain in clean environment in a broken line-like arrangement or a loop-like arrangement according to a process to be performed. A small process device and a small observation device are installed on each clean unit.
Inventors:
ISHIBASHI AKIRA (JP)
Application Number:
PCT/JP2004/008842
Publication Date:
December 29, 2004
Filing Date:
June 17, 2004
Export Citation:
Assignee:
HOKKAIDO TECH LICENSING OFFICE (JP)
ISHIBASHI AKIRA (JP)
ISHIBASHI AKIRA (JP)
International Classes:
B01L1/04; H01L21/00; (IPC1-7): H01L21/02; A01G7/00; B01L1/00; B65G49/00; C12M3/00; F24F7/06; H01L21/68
Domestic Patent References:
| WO2001062070A1 | 2001-08-30 |
Foreign References:
| JP2003090576A | 2003-03-28 | |||
| JPH0230836U | 1990-02-27 | |||
| JP2002026106A | 2002-01-25 | |||
| JPS58109143A | 1983-06-29 | |||
| JPH04214139A | 1992-08-05 | |||
| JP2001143979A | 2001-05-25 |
Attorney, Agent or Firm:
Mori, Koh-ichi (6th Floor Soft Town Ikebukuro 36-1, Nishi
Ikebukuro 2-chome, Toshima-k, Tokyo, JP)
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