Title:
CLEANING DEVICE
Document Type and Number:
WIPO Patent Application WO/1999/046063
Kind Code:
A1
Abstract:
A cleaning device extremely simple in construction and capable of securely removing reaction products remaining and used fluid deposited on a brush, wherein a chamber part (5) is provided in a main body part (4) having an upwardly open recessed part (2) of a size enough for receiving the brush so that the chamber part surrounds the recessed part (2), a plurality of nozzle parts (6) are provided in the main body part (4) between the chamber part (5) and the recessed part (2), and an inlet hole (7) communicating with the chamber part (5) and a delivery hole (3) communicating with the recessed part (2) are provided in the main body part (4).
Inventors:
NEZU MOTOI
Application Number:
PCT/JP1999/001070
Publication Date:
September 16, 1999
Filing Date:
March 05, 1999
Export Citation:
Assignee:
SPEEDFAM CO LTD (JP)
International Classes:
A46B17/06; B08B3/02; B24B53/017; B24B55/06; H01L21/304; (IPC1-7): B08B1/00; B24B37/00
Foreign References:
| JP2622069B2 | 1997-06-18 |
Attorney, Agent or Firm:
Nakabayashi, Mikio (Akasaka 8-chome Minato-ku Tokyo, JP)
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