Title:
CLEANING DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/110648
Kind Code:
A1
Abstract:
Provided is a cleaning device capable of removing a deposit, etc., that has adhered to an applicator, even an applicator in which a high-viscosity application solution is used. Specifically, a cleaning device for cleaning a deposit that has adhered to an applicator extending in one direction formed on a substrate-facing surface that faces a substrate, wherein: the cleaning device is equipped with a cleaning unit that comes into contact with the applicator, and a moving device that causes the cleaning unit to move relatively in the longitudinal direction of the applicator while in contact with the applicator; the cleaning unit is equipped with a first cleaning portion disposed on the front side of the cleaning movement direction, and a second cleaning portion disposed on the rear side of the first cleaning portion; the first cleaning portion has a first cleaning member that contacts the substrate-facing surface and an inclined side surface that is continuous with the substrate-facing surface in the applicator; the second cleaning portion has a second cleaning member that contacts the substrate-facing surface and the inclined side surface in the applicator; and the first cleaning member is configured so as to be formed from a highly rigid material that is less likely to be deformed along the contacting counterpart surface than the second cleaning member.
Inventors:
SUZUKI AKIO (JP)
OKAMOTO SHUNICHI (JP)
OKAMOTO SHUNICHI (JP)
Application Number:
PCT/JP2019/043645
Publication Date:
June 04, 2020
Filing Date:
November 07, 2019
Export Citation:
Assignee:
TORAY ENG CO LTD (JP)
International Classes:
B05C5/02; B05C11/10
Foreign References:
| JP2017209633A | 2017-11-30 | |||
| JP2002177848A | 2002-06-25 | |||
| JPH10216598A | 1998-08-18 | |||
| JPH09192566A | 1997-07-29 | |||
| JP2012200614A | 2012-10-22 | |||
| JP2008149247A | 2008-07-03 |
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