CLEANING MEMBER, DELIVERY MEMBER WITH CLEANING FUNCTION, AND METHOD OF CLEANING SUBSTRATE PROCESSING APPARATUS

Title:

CLEANING MEMBER, DELIVERY MEMBER WITH CLEANING FUNCTION, AND METHOD OF CLEANING SUBSTRATE PROCESSING APPARATUS

Document Type and Number:

WIPO Patent Application WO/2008/018246

Kind Code:

A1

Abstract:

A cleaning member that is free from staining at cleaning sites, being capable of simple and easy, unfailing, satisfactory removal of minute foreign matter, preferably foreign matter of submicron level; a delivery member with cleaning function including the cleaning member; and a method of cleaning a substrate processing apparatus with the use of the cleaning member or delivery member with cleaning function. There is provided a cleaning member comprising a layer member furnished on a major surface thereof with multiple protrusions of columnar structure, wherein the protrusions of columnar structure consist of a carbon nanostructure.

Inventors:

TERADA YOSHIO (JP)
SUGO YUKI (JP)
YOSHIDA YOSHINORI (JP)
MAENO YOUHEI (JP)

Application Number:

PCT/JP2007/062749

Publication Date:

February 14, 2008

Filing Date:

June 26, 2007

Export Citation:

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Assignee:

NITTO DENKO CORP (JP)
TERADA YOSHIO (JP)
SUGO YUKI (JP)
YOSHIDA YOSHINORI (JP)
MAENO YOUHEI (JP)

International Classes:

H01L21/304; B08B1/00

Foreign References:

JP2004063669A	2004-02-26
JP2001351960A	2001-12-21
JPH1187458A	1999-03-30
JPH10154686A	1998-06-09

Other References: