Title:
CLEANING METHOD
Document Type and Number:
WIPO Patent Application WO/2011/148827
Kind Code:
A1
Abstract:
Disclosed is a cleaning method which comprises a cleaning step wherein the upper surface (10a) and at least the upper surface (10a) of the outer peripheral surface (10b) of a work (10) are cleaned with an upper cleaning liquid (3) and the lower surface (10c) of the work (10) is cleaned with a lower cleaning liquid (5) by moving the work (10) in the horizontal direction relative to an upper spray nozzle (2) and a lower spray nozzle (4), which are respectively arranged above and below the work (10), while jetting the upper cleaning liquid (3) and the lower cleaning liquid (5) respectively from the upper spray nozzle (2) and the lower spray nozzle (4). In the cleaning step, the upper cleaning liquid (3) and the lower cleaning liquid (5) are respectively jetted from the upper spray nozzle (2) and the lower spray nozzle (4) so that the upper cleaning liquid (3) always hits at least a part of the region that is composed of the upper surface (10a) and the outer peripheral surface (10b) of the work (10) when the lower cleaning liquid (5) hits on the lower surface (10c) of the work (10).
Inventors:
WATANABE TOMOHIRO (JP)
SUNAZUKA MICHIYA (JP)
YANAGAWA TUTOMU (JP)
SUNAZUKA MICHIYA (JP)
YANAGAWA TUTOMU (JP)
Application Number:
PCT/JP2011/061312
Publication Date:
December 01, 2011
Filing Date:
May 17, 2011
Export Citation:
Assignee:
SHOWA DENKO KK (JP)
WATANABE TOMOHIRO (JP)
SUNAZUKA MICHIYA (JP)
YANAGAWA TUTOMU (JP)
WATANABE TOMOHIRO (JP)
SUNAZUKA MICHIYA (JP)
YANAGAWA TUTOMU (JP)
International Classes:
B08B3/02; G03G5/00; G03G5/10
Foreign References:
| JPH1085682A | 1998-04-07 | |||
| JP2008093546A | 2008-04-24 | |||
| JPS63111986U | 1988-07-19 | |||
| JPH10510753A | 1998-10-20 |
Attorney, Agent or Firm:
SHIMIZU Yoshihito et al. (JP)
Yoshihito Shimizu (JP)
Yoshihito Shimizu (JP)
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Claims: