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Title:
CLOSED CHAMBER
Document Type and Number:
WIPO Patent Application WO/2021/251527
Kind Code:
A1
Abstract:
A closed chamber comprises: a base plate; a plurality of support frames on the base plate; a plurality of connecting blocks for connecting the plurality of support frames; a plurality of panels for covering the open region between the plurality of support frames; and first closing members disposed between the plurality of support frames and the plurality of connecting blocks.

Inventors:
SONG DONGWOOK (KR)
Application Number:
PCT/KR2020/007603
Publication Date:
December 16, 2021
Filing Date:
June 11, 2020
Export Citation:
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Assignee:
LG ELECTRONICS INC (KR)
International Classes:
H01L21/67
Foreign References:
KR20120095071A2012-08-28
US20100270299A12010-10-28
KR101416815B12014-07-09
JPH09209150A1997-08-12
KR20110126199A2011-11-23
Attorney, Agent or Firm:
HAW, Yong Noke (KR)
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