COATED ARTICLE INCLUDING TITANIUM OXYCARBIDE AND METHOD OF MAKING SAME

Title:

COATED ARTICLE INCLUDING TITANIUM OXYCARBIDE AND METHOD OF MAKING SAME

Document Type and Number:

WIPO Patent Application WO2004081251

Kind Code:

A3

Abstract:

A coated article (1) is provided which includes a layer including titanium oxycarbide (3b). In order to form the coated article (1), a layer of titanium oxide (3a) is deposited on a substrate by sputtering or the like. After sputtering of the layer including titanium oxide (3a), an ion beam source(s) (25), is used to implant at least carbon ions into the titanium oxide (3a). When implanting, the carbon ions have sufficient ion energy so as to knock off oxygen (O) from TiOx molecules so as to enable a substantially continuous layer comprising titanium oxycarbide (3b) to form near a surface of the previously sputtered layer.

Inventors:

VEERASAMY VIJAYEN S (US)
THOMSEN SCOTT V (US)
PETRMICHL RUDOLPH HUGO (US)

Application Number:

PCT/US2004/007054

Publication Date:

May 06, 2005

Filing Date:

March 09, 2004

Export Citation:

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Assignee:

GUARDIAN INDUSTRIES (US)
VEERASAMY VIJAYEN S (US)
THOMSEN SCOTT V (US)
PETRMICHL RUDOLPH HUGO (US)

International Classes:

C03C17/22; C03C17/245; C23C14/06; C23C14/08; C23C14/48; C23C14/58; (IPC1-7): B32B19/00; C23C14/34; C23C16/00

Foreign References:

JPH06158273A	1994-06-07
US4497700A	1985-02-05
US4693944A	1987-09-15
EP1160353A1	2001-12-05
EP0997191A1	2000-05-03

Other References: