Title:
COATING DEVICE AND COATING METHOD
Document Type and Number:
WIPO Patent Application WO/2023/157285
Kind Code:
A1
Abstract:
Provided are a coating device and a coating method that are able to form an evenly coated film. According to an embodiment, this coating device includes a coating bar, a plurality of nozzles, a plurality of holding parts, and a detecting part. The coating bar is able to face a member to be coated. The plurality of nozzles are able to supply a liquid to the coating bar. One of the plurality of holding parts holds one of the plurality of nozzles. The one of the plurality of holding parts is able to control the position of the one of the plurality of nozzles relative to the coating bar. The detecting part is able to detect an amount corresponding to the respective positions of the plurality of nozzles relative to the coating bar.
Inventors:
SHIDA NAOMI (JP)
NAITO KATSUYUKI (JP)
SAITA YUTAKA (JP)
NAITO KATSUYUKI (JP)
SAITA YUTAKA (JP)
Application Number:
PCT/JP2022/006886
Publication Date:
August 24, 2023
Filing Date:
February 21, 2022
Export Citation:
Assignee:
TOSHIBA KK (JP)
TOSHIBA ENERGY SYSTEMS & SOLUTIONS CORP (JP)
TOSHIBA ENERGY SYSTEMS & SOLUTIONS CORP (JP)
International Classes:
B05C1/02; B05C1/06; B05C11/10; B05D1/28; B05D7/00; B05D7/24
Domestic Patent References:
| WO2022029861A1 | 2022-02-10 | |||
| WO2021181445A1 | 2021-09-16 |
Foreign References:
| JP2009183914A | 2009-08-20 | |||
| JP2006256051A | 2006-09-28 | |||
| JP2021182618A | 2021-11-25 |
Attorney, Agent or Firm:
IX PATENT LAW FIRM, P.C. et al. (JP)
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