Title:
COLLET DETECTION DEVICE, COLLET POSITION CORRECTION DEVICE, BONDING DEVICE, COLLET DETECTION METHOD, AND COLLET POSITION CORRECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2022/185875
Kind Code:
A1
Abstract:
A collet detection device 30 that detects the position or state of a collet 24 that suctions a chip 21, said collet detection device 30 being characterized by comprising a light source 32 that radiates light onto the collet 24 from a diagonal direction with respect to the collet 24 and that casts a shadow K of the collet 24 onto an imaged surface 29a, a camera 31 that images the imaged surface 29a and the shadow K of the collet 24 on the imaged surface 29a as an image, and an image recognition means 33 that recognizes the shadow K within the image, and in that the position or the state of the collet 24 is detected via the shadow K recognized within the image by the image recognition means 33.
Inventors:
NAGAMOTO NOBUHIRO (JP)
Application Number:
PCT/JP2022/005347
Publication Date:
September 09, 2022
Filing Date:
February 10, 2022
Export Citation:
Assignee:
CANON MACHINERY INC (JP)
International Classes:
H01L21/52
Foreign References:
| JP2009032810A | 2009-02-12 | |||
| JP2004288715A | 2004-10-14 | |||
| JPH02150041A | 1990-06-08 |
Attorney, Agent or Firm:
SHIROMURA Kunihiko et al. (JP)
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