Title:
COMBINATION STRUCTURE OF UHV DEVICE INTERCONNECTED IN-SITU REACTION CELL AND BUILT-IN MASS SPECTRUM ELECTRIC QUADRUPOLE ROD
Document Type and Number:
WIPO Patent Application WO/2019/174108
Kind Code:
A1
Abstract:
The present invention relates to a combination structure of a UHV device interconnected in-situ reaction cell and a built-in mass spectrum electric quadrupole rod, characterized in that one end of a stainless steel capillary channel is connected to an exhaust air duct of the in-situ reaction cell, and the other end is a sampling port; the sampling gas is divided into two paths after flowing out of the sampling port, one enters into a vacuum transfer cavity by means of a low flow control ratio valve, and the other enters into a spectrum electric quadrupole rod by means of a high flow control ratio valve. According to the present invention, when the mass spectrum electric quadrupole rod performs gas sampling component analysis on the interconnected in-situ reaction cell, the sampling time delay can be neglected, and the sampling analysis requirements for in-situ analysis of continuity, real-time and high time resolution are met.
Inventors:
YANG YONG (CN)
Application Number:
PCT/CN2018/084398
Publication Date:
September 19, 2019
Filing Date:
April 25, 2018
Export Citation:
Assignee:
UNIV SHANGHAI TECH (CN)
International Classes:
G01N27/62; B01J3/04
Foreign References:
| CN105702554A | 2016-06-22 | |||
| CN102612641A | 2012-07-25 | |||
| CN104142364A | 2014-11-12 |
Attorney, Agent or Firm:
SHANGHAI SHENHUI PATENT AGENT CO., LTD. (CN)
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