Title:
COMPLEMENTARY RING OSCILLATORS TO MONITOR IN-SITU STRESS WITHIN INTEGRATED CIRCUITS
Document Type and Number:
WIPO Patent Application WO/2020/125506
Kind Code:
A1
Abstract:
The disclosure relates to technology for determining stress on integrated circuits. These include using ring oscillators formed on the integrated circuit, where one ring oscillator has its frequency dependent on the current flowing through its stages being limited by its NMOS devices and another ring oscillator has its frequency dependent on the current flowing through its stages being limited by its PMOS devices. This allows the stress on the integrated circuit to be determined in different directions along the integrated circuit. A temperature sensor can be used to compensate for temperature dependence on the frequencies of the ring oscillators.
Inventors:
GU SHIQUN (US)
LIU HONG (US)
LIU HONG (US)
Application Number:
PCT/CN2019/124422
Publication Date:
June 25, 2020
Filing Date:
December 11, 2019
Export Citation:
Assignee:
HUAWEI TECH CO LTD (CN)
International Classes:
G01R31/28; G01R31/26
Foreign References:
| US20170350938A1 | 2017-12-07 | |||
| US20050212543A1 | 2005-09-29 | |||
| US20060238267A1 | 2006-10-26 | |||
| CN102495352A | 2012-06-13 | |||
| US20110090015A1 | 2011-04-21 |
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