Title:
COMPONENT ANALYSIS SYSTEMS AND METHODS
Document Type and Number:
WIPO Patent Application WO/2013/016305
Kind Code:
A3
Abstract:
Component characteristics analysis systems and methods are described. In one embodiment, a ring oscillator comprises: at least one inversion stage operable to cause a signal transition; a target component that has an increased comparative impact or influence on a signal transition propagation in the ring oscillator; and an output component for outputting an indication of the impact the target component has on the signal transition. The target component can include a plurality of vias from one metal layer to another metal layer. The plurality of vias from one metal layer to another metal layer can be configured in a cell. The vias can correspond to a via layer. In one exemplary implementation, the output is coupled to an analysis component. The analysis component can include correlation of the via resistance into a wafer variations and generate a wafer map. The analysis component can include correlation of the via resistance into a wafer.
Inventors:
POPPE WOJCIECH JAKUB (US)
ELKIN ILYAS (US)
GUPTA PUNEET (US)
ELKIN ILYAS (US)
GUPTA PUNEET (US)
Application Number:
PCT/US2012/047897
Publication Date:
March 21, 2013
Filing Date:
July 23, 2012
Export Citation:
Assignee:
NVIDIA CORP (US)
POPPE WOJCIECH JAKUB (US)
ELKIN ILYAS (US)
GUPTA PUNEET (US)
POPPE WOJCIECH JAKUB (US)
ELKIN ILYAS (US)
GUPTA PUNEET (US)
International Classes:
G01R31/26; G01R13/22; G01R31/28
Foreign References:
| KR20010035660A | 2001-05-07 | |||
| US20030001185A1 | 2003-01-02 | |||
| US20060028241A1 | 2006-02-09 | |||
| US20080094053A1 | 2008-04-24 | |||
| US7180794B2 | 2007-02-20 |
Attorney, Agent or Firm:
RYAN, John, F. (Two North Market StreetThird Floo, San Jose CA, US)
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