Title:
COMPONENT FOR PROCESS CHAMBER, AND PROTECTIVE FILM TREATING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2022/182166
Kind Code:
A1
Abstract:
The present invention provides a protective film treating apparatus which coats the surface of a plurality of objects to be treated with a protective film all at once, while positioning a part, which does not require protective film coating, outside a treatment receptacle to more efficiently use the limited space of the treatment receptacle, thereby enhancing the product yield and preventing a protective film material from being wasted. Further, the present invention provides a component, for a process chamber, exhibiting excellent corrosion resistance in a plasma treatment environment.
Inventors:
AHN BUM MO (KR)
PARK SEUNG HO (KR)
SONG TAE HWAN (KR)
PARK SEUNG HO (KR)
SONG TAE HWAN (KR)
Application Number:
PCT/KR2022/002716
Publication Date:
September 01, 2022
Filing Date:
February 24, 2022
Export Citation:
Assignee:
POINT ENGINEERING CO LTD (KR)
International Classes:
C23C16/44; C23C16/40; C23C16/455; C23C16/458; C23C28/04; C25D11/00; C25D11/02; H01J37/32
Foreign References:
| KR101465640B1 | 2014-11-28 | |||
| KR20210005961A | 2021-01-15 | |||
| KR20180087457A | 2018-08-01 | |||
| US20170260616A1 | 2017-09-14 | |||
| US20200181771A1 | 2020-06-11 |
Attorney, Agent or Firm:
CHOI, Kwang Seok (KR)
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