FIELD OF THE INVENTION

[ 01 ] The invention relates to a component processing apparatus, such as a sintering apparatus, or a packaging apparatus for sintering or packaging a component. The invention further relates to a corresponding component processing method.

BACKGROUND OF THE INVENTION

[ 02 ] Such a component processing apparatus and method can be used for sinter bonding an electronic component on a component carrier or substrate. In particular, in a sintering apparatus, a good bond between the component, such as semiconductor device like a power IC, and its substrate or carrier is achieved by applying pressure onto components. Initially, the devices to be sintered are positioned onto the carrier or substrate together with a sintering material in between. Subsequently, a pressure is applied using, for instance, an actuator exerting a pressure on the associated component and the sintering material. Generally, during the sintering process, the component is heated while pressure is applied. The sintering process allows the creation of a particularly solid bond.

[ 03 ] The devices to be processed may concern chips, DBC’s, spacers, heatsinks, sensors, power ICs, flip chips, MEMs, etcetera. Generally, for manufacturing, sintering apparatuses are tailored on particular needs of the manufacturer and/or on particular (geometric) characteristics of the product to be sintered. For this reason, usually, a sintering apparatus only allows the processing of components having similar, if not the same, geometric characteristics. The limited variety of products that a usual sintering apparatus can process may be disadvantageous when the apparatus is used for creating prototypes or when it is necessary to produce a vast assortment of different products, i.e. in the scientific and technologic research. For the purpose of creating a large variety of products with the same sintering apparatus, it may be advantageous to have an apparatus configured to process components having a large variety of geometries, i.e. components spanning over a wide range of surfaces.

[ 04 ] In a usual sintering apparatus, an actuator, like a piston, is used to transfer a force onto the component so that the pressure needed for sintering is exerted on the component and the sintering material. The magnitude of the force to be applied may vary depending on the specific sintering application. A limited range of the forces that the actuator can exert onto the component may generate an erroneous low or high pressure, at the limits of the pressure range that can be provided by the tool, on the component and the sintering material. This may result in an incomplete sintering process and, therefore, in failures and/or malfunctions of the final product. To have a correct sintering pressure applied in the sintering process one would need to develop and build a specific tool for the purpose, Present apparatuses do not provide much flexibility in pressures that can be applied. For the purpose of exerting the correct pressure on different components with the same sintering apparatus, it would be advantageous to have an apparatus that allows for a very large range of forces to be exerted on the component processed.

[ 05 ] In addition, to prevent failures of the processed product, it is very important that the pressure exerted on the component, during any process in which a pressure is applied to a component, is measured or monitored. Especially, when using an actuator for exerting a pressure, it is very important to verify in real time the pressure exerted on a component. Indeed, it is important to avoid that uneven pressure is applied throughout the whole surface of the component to be processed due to a malfunction of one or more actuators or any other cause leading to a failure in force generation. The actuator may, for instance, get stuck during the process sequence. Therefore, it may be very important as well to have the real time pressure exerted available.

[ 06 ] Reference is made above to a sintering apparatus and method. However, there are more processes that require applying a pressure to a component when processing the component, such as a packaging apparatus and method. In such apparatus and method a component can packaged by partly surrounding the component with a suitable resin, while, for instance, leaving a surface area uncovered by covering and applying a suitable pressure to that area. The limitations, drawbacks and disadvantages of the sintering apparatus and method described apply equally well to such apparatuses and methods.

SUMMARY OF THE INVENTION

[ 07 ] It is an objective of the invention to provide a component processing apparatus and method allowing the processing of components spanning over a wide range of surfaces. [ 08 ] It is another or alternative objective of the invention to provide a component processing apparatus and method configured to provide a broad range of forces over a wide range of surfaces.

[ 09 ] It is another or alternative objective of the invention to provide a component processing apparatus and method that is flexible and can be used for processing a wide variety of components.

[ 10 ] It is another or alternative objective of the invention to provide a component processing apparatus and method that can be easily converted to be used with different components.

[ 11 ] It is another or alternative objective of the invention to provide a component processing apparatus that can be embodied with very small dimensions.

[ 12 ] According to an aspect, the invention provides a component processing apparatus, such as a sintering apparatus or a packaging apparatus for sintering or packaging a component, respectively, comprising a holding tool part for holding a component to be processed, and a press tool part configured and arranged for applying a force onto the single component held by the holding tool part in a pressure direction, wherein the press tool part comprises a plurality of concentrically-aligned actuators acting in the pressure direction and comprising one or more respective actuator pistons that are movable in respective actuator cylinders in a housing and act by a fluid pressure in the respective actuator cylinders for applying the force onto the component, the one or more respective actuator pistons of each actuator define a total cross-sectional surface area, transverse to the pressure direction, onto which the respective fluid pressure acts, and the total cross-sectional surface areas of the actuators are different with respect to one another by at least a factor 3, and wherein the press tool part is configured for selectively activating each actuator of the plurality of actuators to actuate when activated and not actuate when not activated to set the force applied onto the component by selectively activating one or more actuators. Concentrically-aligned actuators are actuators that act along a common axis, and could be nested in one another or be arranged in line with one another. Employing two actuators would mean that the ratio of the total cross-sectional surface area of both actuators would be at least 3, in which the ratio is defined by the largest total cross-sectional surface are over the smallest total cross-sectional surface area. The boundaries of the force range that is achieved by only using the actuator with the smallest total cross-sectional surface area at a given fluid pressure range are multiplied by the factor when using the actuator with the largest cross-sectional surface area at the same fluid pressure range. Using both actuators would provide an even larger multiplication of 1 plus the factor, so larger than 4. Employing three actuators would mean that the ratio of the largest cross-sectional surface area of the respective actuator over the smallest cross-sectional surface area of the respective actuator would at least be (3 times 3 is) 9. The multiplication of the force range when using all three actuators would be at least 1 plus 3 plus 9, so larger than 13. In this fashion an apparatus is provided that can cover a very large force range by selecting the fluid pressure range, number of actuators and their total cross-sectional surface ratios and their actual total cross-sectional surface areas as appropriate.

[ 13 ] According to another aspect, the invention provides a component processing method, such as a sintering method or a packaging method for sintering or packaging a component, respectively, the method comprising the steps of providing a holding tool part for holding a component to be processed; providing a component to be processed onto the holding tool part; providing a press tool part configured and arranged for applying a force onto the component held by the holding tool part in a pressure direction, wherein the press tool part comprises a plurality of concentrically-aligned actuators acting in the pressure direction and comprising one or more respective actuator pistons that are movable in respective actuator cylinders in a housing and act by a fluid pressure in the respective actuator cylinders for applying the force onto the component, the one or more respective actuator pistons of each actuator define a total cross-sectional surface area, transverse to the pressure direction, onto which the respective fluid pressure acts, and the total cross-sectional surface areas of the actuators are different with respect to one another, and wherein the press tool part is configured for selectively activating each actuator of the plurality of actuators to actuate when activated and not actuate when not activated to set the force applied onto the component by selectively activating one or more actuators; applying a force onto the component held by the holding tool part by selectively activating at least one actuator of the plurality of actuators of the press tool part; and processing the component when applying said force onto the component held by the holding tool part in the pressure direction.

[ 14 ] In an embodiment, the press tool part is configured for setting the fluid pressure of activated actuators to additionally set the force applied onto the component.

[ 15 ] In an embodiment, the press tool part is configured for collectively setting the fluid pressure for all activated actuators.

[ 16 ] In an embodiment, the one or more respective actuator pistons of each actuator act by a pneumatic or hydraulic pressure in the respective actuator cylinders.

[ 17 ] In an embodiment, the plurality of concentrically-aligned actuators comprise concentrically-nested actuator pistons and respective actuator cylinders, especially annularly-shaped actuator pistons.

[ 18 ] In an embodiment, the plurality of concentrically-aligned actuators comprise actuator pistons and respective actuator cylinders that are in line.

[ 19 ] In an embodiment, the total cross-sectional surface areas of the actuators increases from an innermost actuator to an outermost actuator.

[ 20 ] In an embodiment, the press tool part is configured to selectively activate actuators by adding an activated actuator to actuators that are already being activated from the innermost actuator to the outermost actuator, and by de activating an activated actuator from activators that are being activated from the outermost actuator to the innermost actuator.

[ 21 ] In an embodiment, the plurality of actuators comprises at least three actuators.

[ 22 ] In an embodiment, the plurality of actuators comprises four actuators.

[ 23 ] In an embodiment, the total cross sectional surface areas of the actuators are different with respect to one another by at least a factor 4.

[ 24 ] In an embodiment, the total cross sectional surface areas of the actuators are different with respect to one another by at least a factor 5.

[ 25 ] In an embodiment, the total cross sectional surface areas of the actuators are different with respect to one another by at least a factor 6. Such apparatus and method prove to provide a very large force at practical fluid pressure ranges.

[ 26 ] In an embodiment, the plurality of actuators comprises four actuators, each actuator having one actuator piston and corresponding actuator cylinder, and the total cross sectional surface areas of the innermost actuators define a ratio in the range of 9 to 13, especially 11 , the total cross sectional surface areas of the actuator between the innermost actuator and outermost actuator define a ratio in the range of 10 to 14, especially 12. Having the largest ratios provided by the innermost actuators allows to embody an apparatus with relatively smaller dimensions.

[ 27 ] In an embodiment with four actuators, the total cross sectional surface areas the outermost actuators define a ratio in the range of 4 to 8, especially 6. Such apparatus allows to provide a total multiplication factor for the force range covered of about 1 ,000, which proves very sufficient in most application with practical total cross-sectional surface areas.

[ 28 ] In an embodiment, the plurality of actuators comprises four actuators, of which three actuators providing the largest cross sectional surface areas are concentrically nested, of which two actuators providing the smallest cross sectional surface areas are in line, and of which two actuators providing the largest cross sectional surface areas are annularly shaped. Such configuration provides for an apparatus with very compact dimensions, while covering a very large force range.

[ 29 ] In an embodiment, the press tool part is configured to allow selective blocking of one or more actuator pistons to prevent applying force onto the component by selectively blocked one or more actuator pistons.

[ 30 ] In a further embodiment, a return piston is associated with each actuator piston, wherein the return piston acts opposite the pressure direction, and is configured and arranged to allow blocking the associated actuator piston and preventing the associated actuator piston from applying force onto the component.

[ 31 ] In yet another embodiment, at least one movable insert member is associated with each actuator piston of at least one actuator and is arranged at an intermediate position between the associated actuator piston and the component to apply force onto the component when the associated actuator is activated.

[ 32 ] In an embodiment, movable insert members are associated with concentrically-nested actuators.

[ 33 ] In an embodiment, at least one movable insert member is mechanically connected to the associated actuator piston.

[ 34 ] In an embodiment, movable insert member associated with an actuator are concentrically aligned with the actuator.

[ 35 ] In an embodiment, the movable insert members are configured as bars.

[ 36 ] In an embodiment, the movable insert members are guided in the housing.

[ 37 ] In another embodiment, the apparatus comprises a rigid press plate configured and arranged to be acted upon by at least a part of the plurality of actuators and to act on the component to apply force on the component

[ 38 ] In an embodiment, at least one pressure sensor is configured to measure and/or monitor the force exerted onto the component by the associated actuator.

[ 39 ] In an embodiment, at least one pressure sensor is associated to at least one of the plurality of actuators and/or is located in the holding tool part .

[ 40 ] In an embodiment, processing the component further includes applying force onto the component according to a predetermined time-dependent function.

[ 41 ] In an embodiment, processing the component includes regulating a temperature of the component by providing heat to the component. [ 42 ] In an embodiment, processing the component further includes regulating the temperature of the component based on a time-dependent temperature profile.

[ 43 ] In yet another embodiment, processing the component further includes applying force onto the component according to a temperature of the component.

BRIEF DESCRIPTION OF THE DRAWINGS

[ 44 ] Further features and advantages of the invention will become apparent from the description of the invention by way of non-limiting and non-exclusive embodiments. These embodiments are not to be construed as limiting the scope of protection. The person skilled in the art will realize that other alternatives and equivalent embodiments of the invention can be conceived and reduced to practice without departing from the scope of the present invention. Embodiments of the invention will be described with reference to the accompanying drawings, in which like or same reference symbols denote like, same or corresponding parts, and in which

Figures 1A and 1 B schematically represent cross sections of a component processing apparatus according to an embodiment of the invention;

Figures 2A and 2B schematically represent cross section views of a press tool part apparatus according to embodiments of the invention;

Figure 3A represents a view of a press part tool of a component processing apparatus according to an embodiment of the invention;

Figure 3B, 3C, 3D, 3E, 3F and 3G represent cross sections of a press part tool of a component processing apparatus according to an embodiment of the invention.

DETAILED DESCRIPTION OF EMBODIMENTS

[ 45 ] Figure 1A schematically shows a cross section of a component processing apparatus 100 according to an embodiment of the invention. The component processing apparatus 100, such as a sintering apparatus or a packaging apparatus for sintering or packaging a component, respectively, comprises a holding tool part 200 for holding a component 10 to be processed and a press tool part 300 comprising a plurality of actuators 310. The component 10 to be processed, for instance, a power IC 10b provided on its carrier or substrate 10a together with a sintering material in between power IC and substrate, is positioned and placed onto the holding tool part 200. The press tool part 300 is configured and arranged for applying force onto the component 10 held by the holding tool part 200 in a pressure direction A by selectively activating (actuating) at least one of the plurality of actuators that comprise pneumatic actuator pistons 310 slidable mounted in actuator cylinders 304. The actuator pistons 310 are activated (actuated) by applying a fluid (pneumatic or hydraulic) pressure on them at their top sides, i.e. by filling the associated actuator cylinder 304 with a pressurized fluid (gas or liquid). In case that more than one actuator piston 310 is activated (actuated), pressure by the pressurized gas, in the embodiment shown, is applied to all the activated actuator pistons. Gas is collectively provided at a common selected pressure to all activated actuator pistons. Activated means that the respective actuator is actually actuated to exert force. As a result, the force exerted by the press tool part 300 onto the component 10 can be varied over a considerable range, depending on the number of the actuated actuator pistons 310 and the fluid pressure within the actuator cylinders 304.

[ 46 ] The press tool part 300 additionally comprises at least one movable insert member 320 mechanically connected to each actuator piston 310. The movable insert member 320 is located at an intermediate position between the associated piston 310 and the component 10. When an actuator piston 310 is actuated, it applies a force onto the associated movable insert member(s) 320 to exert force on the component 10 along the direction A.

[ 47 ] The press tool part 300 and the holding tool part 200 are generally moved apart from one another before processing the component 10. The component 10 is provided onto the holding tool part 200 and the component carrier or substrate 10a is fixed to a determined position relative to the holding tool part 200. The press tool part 300 and the holding tool part 200 are then moved towards one another to bring them together until the movable insert members 320 and the component 10 to be processed are located one above the other at a predetermined position. When the press tool part 300 and the holding part 200 are at the predetermined position, at least a part of the movable insert members 320 of the press tool part 300 touch the component 10 to be processed, while the remaining part of the movable insert members 320 are arranged to leave a gap between them and the component 10. Alternatively, all movable insert members 320 touch the component 10 to be processed or are arranged to leave a gap between them and the component 10.

[ 48 ] Subsequently, a force is applied onto the component 10 held by the holding tool part 200 along a pressure direction A by selectively activating at least one of the actuator pistons 310. To exert a homogenous and uniform pressure onto the component 10 when multiple actuator pistons and/or inserts are employed, the plurality of actuator pistons 310 and the plurality of movable insert members 320 are symmetrically arranged in the embodiments disclosed. Actually, the actuator pistons are grouped in concentrically-aligned actuators, which means that the actuators have a common axis that is also a force axis of the force exerted onto the component 10 by the actuator. The activator pistons of an actuator are symmetrically arranged around the actuator axis and are collectively activated for activating the actuator when the actuator is activated.

[ 49 ] According to the force needed for processing the component 10, a selected number of actuators having the actuator pistons 310 are activated. To prevent that a non- actuated actuator piston exerts a force, e.g. the weight force, on the component 10, at least one return piston 311 , arranged in the press tool part 300, is associated to each actuator piston 310. The return piston 311 is movably inserted in a return cylinder 312 and, when actuated, moves along a direction opposed to the direction A to push the associated actuator piston 310 away from the component 10 so as to block the associated actuator piston 310 at a predetermined position within its actuator cylinder 304. The return pistons 311 are actuated by applying a pressure on them at their bottom sides, i.e. by filling the associated return cylinder 312 with a pressurized gas. When a blocked actuator piston is pushed away from the component 10 by the associated return piston(s) 311 , the associated movable insert member(s) 320 follow(s) the actuator piston 310 and move(s) away from the component 10. This prevents that movable insert member(s) 320, associated with a non- actuated actuator piston 310, exert a force onto the component 10.

[ 50 ] The actuator pistons 310 of apparatus 100 have been described as pneumatic pistons. However, the person skilled in the art will realize that hydraulic pistons movable in cylinders, or generally fluid-activated pistons can be used in the press tool part 300 of this embodiment and of the other embodiments of this invention.

[ 51 ] When the process is a sintering process, as referred to above, the component 10 is generally heated to sinter the sintering material and to achieve a bond between the respective parts being sintered together. Heat can be provided in various ways to the component 10, for instance, by heating elements provided in the holding tool part 200, in the press tool part 300, and/or in the movable insert members 320. Optionally, a time- dependent temperature profile is applied during the sintering process, and the applied pressure can be set as a function of time and/or temperature. Heating may be provided before the pressure is applied to pre-heat the component 10 and increased during the sintering process while the actuated actuators 310 exert a pressure on the component 10. Heat may also be provided by a heating element, not shown, included in the apparatus 100, wherein the heating element is configured to generate heat and arranged to be in thermal contact with the component to be processed for transferring heat to it. A pressure profile onto the component 10 can be provided by setting a pressure profile of the pressurized gas acting upon the actuator pistons.

[ 52 ] Figure 1 B shows a press tool part 300 and a holding tool part 200, according to an embodiment of the invention. The working principles of the press tool part 300 of figure 1 B are the same as the working principles of the press tool part 300 described in relation to figure 1A, to which reference is made. The actuator pistons 310 of figure 1A correspond to the actuator pistons 310.1 , 310.2, and 310.3 of figure 1 B, wherein peripheral actuator pistons 310.2 and 310.3 are symmetrically arranged with respect to the central actuator piston 310.1 . The person skilled in the art will realize that the number of actuator pistons is not limited to the number of pistons shown in figure 1 B. The plurality of peripheral actuator pistons 310.2 and 310.3 are comprised in one actuator that is concentrically-aligned with the central actuator of single actuator piston 310.1 , so that the actuator with actuator piston 310.1 is concentrically nested within the actuator with actuator pistons 310.2 and 310.3.

[ 53 ] The movable insert members 320 of figure 1A correspond to the movable insert member 320.1 , 320.2, and 320.3 of figure 1 B associated with actuator pistons 310.1 , 310.2, and 310.3, respectively. The working principles of the movable insert members 320.1 , 320.2, and 320.3 are the same as the working principles of the movable insert members 320 described in relation to figure 1 A, to which reference is made.

[ 54 ] In relation to figure 1 B, a rigid press plate 230 is located between the press tool part 300 and the component 10 to be processed. The rigid press plate 230 is configured to be acted upon by the selectively actuated movable insert members 320.1 , 320.2, and 320.3 and pass the force by the insert members to the component 10. When the actuator pistons 310.1 , 310.2, and 310.3 are activated, the movable insert member(s) 320.1 , 320.2, and 320.3 act upon the rigid press plate 230 which transfers the force onto the component 10 and the sintering material. The presence of the rigid press plate 230 allows a uniform and homogeneous application of the force onto the component 10. The press plate 230 can be designed based on the geometry of the component so that the same apparatus 100 can be used for different components having a large variety of geometries. Additionally, when it is necessary to heat the component 10 during processing, the press plate 230 can be made of a thermally conductive material.

[ 55 ] The total force exerted onto the component 10 depends on the pressure of the gas used to actuate the actuator pistons, on the number of actuated actuator pistons, on the cross-section surface of each piston, etc. The possibility of actuating only a part of the actuator pistons by selectively activating actuators comprising the activator pistons provides also flexibility to the apparatus 100 in the magnitude of the force to be applied to components 10 for different processes needing the application of a wide range of forces. [ 56 ] Figs. 2A and 2B show cross sections of a perspective view of press tool parts 300 configured to be used in the component processing apparatus 100. The press tool parts 300 of figures 2A and 2B can be used as the press tool part 300 described in relation to figures 1A and 1 B, to which reference is made. The press tool part 300 of figure 2A comprises a plurality of actuator pistons 310.1 , 310.2, 310.3, and 310.4 slidably mounted in cylinders 304.1 , 304.2, 304.3, and 304.4, respectively. Actuator pistons 310.2, 310.3, and 310.4 are comprised in a single actuator that is concentrically arranged with respect to a central actuator comprising the single actuator piston 301.1. Actually, the actuator pistons 310.2, 310.3 and 310.4 and respective actuator cylinders 304.2, 304.3 and 304.4 together with a fourth activator piston opposite activator piston 310.4 and respective actuator cylinder, which do not show in figure, are comprised in the single actuator. The actuator comprising actuator piston 310.1 and the actuator comprising actuator pistons 310.2, 310.3 and 310.4 are concentrically nested, which in the present case means that the actuator with actuator piston 310.1 is provided inside the other actuator.

[ 57 ] In relation to figure 2B, the press tool part 300 comprises two actuators having actuator pistons 301.1 and 301.2, respectively, wherein annular actuator piston 310.2 and central actuator piston 310.1 are concentrically nested and aligned. In this embodiment, actuator piston 310.2 is slidably mounted in cylindrical annular-shaped peripheral cylinder 304.2, wherein the actuator cylinder 304.2 is concentric with respect to the actuator cylinder 304.1. The person skilled in the art will realize that the number of actuator pistons shown in figures 2A and 2B does not limit the number of actuator pistons that can be implemented in the press tool parts 300. The two actuators of the figure 2B embodiment each have a single actuator piston moving in their respective actuator cylinders.

[ 58 ] Figs. 3A, 3B, 3C, 3D, 3E, 3F, and 3G show a view and cross sections according to different planes, of a press tool part 300 configured to be used in a component processing apparatus. The working principles of the press tool part of figures 3A, 3B, 3C, 3D, 3E, 3F, and 3G are similar to the working principles of the press tool part 300 of figures 1A and 1 B to which reference is made. The person skilled in the art will realize that the press tool part 300 of figures 3A, 3B, 3C, 3D, 3E, 3F, and 3G can be used to act directly onto the component, as shown in figure 1A, or onto a rigid press plate 230, as shown in Fig. 1 B. [ 59 ] The press tool part 300 comprises a housing 301 including a top part 301.1 , a bottom part 301 .2 and side parts 301 .3 surrounding various internal fixed parts 302. The top part 301 .1 , the bottom part 301 .2, the side parts 301 .3, and the internal fixed parts 302 are provided as individual elements fastened together by means of screws, bolts 303 or the like. The position of the press tool part 300, when mounted in the component processing apparatus (not shown), is defined by positioning pins 305 protruding from the top part 301 .1 and the bottom part 301 .2 of the press tool part 300 and matching positioning pinholes formed in the component processing apparatus (not shown).

[ 60 ] The top, bottom, side and internal fixed parts of the press tool part 300 define a plurality of actuator cylinders 304.1 , 304.2, and 304.3 in each of which an actuator piston

310.1 , 310.2, and 310.3, respectively, is slidably mounted. Each actuator piston 310.1 ,

310.2, and 310.3 can move within the actuator cylinder 304.1 , 304.2, and 304.3, respectively, along a direction A toward the component to be processed. The actuator pistons 310.1 , 310.2 and 310.3 and their respective actuator pistons each define an actuator. These three actuators are concentrically nested and concentrically aligned.

[ 61 ] Each actuator piston 310.1 , 310.2, and 310.3 is actuated by providing a pressurized gas to the respective actuator cylinder through at least one associated gas inlet 340.1 , located on the outer surface of the housing 301 , and conduit 350.1 . Actuator pistons 310.2, and 310.3 are symmetrically arranged with respect to a central actuator piston 310.1 defining a center 306 of the press tool part 300. In particular, actuator pistons 310.2 and 310.3 are concentric to each other and concentric with respect to the central actuator piston 310.1. In this embodiment, actuator pistons 310.2 and 310.3 are slidably mounted in cylindrical annular-shaped peripheral cylinders 304.2, and 304.3, respectively, wherein intermediate actuator cylinder 304.2 is nested within outer actuator cylinder 304.3. However, the person skilled in the art will realize that the same invention can be carried out with any kind of plurality of pistons concentrically disposed with respect to the center 306 of the press tool part 300.

[ 62 ] Another actuator having actuator piston 330 faces the component to be processed and is located in correspondence to the center 306 of the press tool part 300. The actuator piston 330, protruding from the bottom part 301.1 of the press tool part 300, when actuated, exerts a pressure onto the component or onto the press plate. The actuators having cylindrical-shaped actuator pistons 310.1 and 330 are both concentrically-aligned and in-line. The actuators having actuator pistons 310.1 , 310.2 and 310.2 are concentrically-aligned and concentrically-nested. The actuator piston 330 acts directly onto the component 10 or a rigid press plate, while the actuator pistons 310.1 , 310.2 and 310.3 act through inserts 320.1 , 320.2 and 320.3, respectively, onto the component or the rigid press plate.

[ 63 ] According to the force needed for processing the component, a selected number of actuator pistons 310.1 , 310.2, 310.3 and 330 are actuated. In case that more than one actuator piston 310.1 , 310.2, 310.3 and 330 is actuated, pressure by the pressurized gas is applied to all the activated pistons by injecting the pressurized gas through conduits 350.1 in the respective actuation cylinders.

[ 64 ] The pressurized gas is provided to each actuator piston to be actuated by injecting the gas through the gas inlet(s) 340.1 and the conduit 350.1 associated with the actuator piston to be actuated. Gas is provided at a common pressure, ranging, for instance, from 1 to 300 bar, to all actuated pistons. Gas pressure can be provided according to a time- dependent pressure profile. In case the process requires the heating of the component, the pressure provided to the actuator pistons can be set as a function of time and/or temperature. The control of the gas flow can be performed electronically by means of a processor, included in the component processing apparatus, configured to remotely control the gas flow or can be manually pre-set before starting to process the component.

[ 65 ] At a given common pressure of the pressurized gas provided to the actuator pistons, the force exerted by each actuator piston 310.1 , 310.2, 310.3 and 330 depends on its cross-sectional surface area along a plane transverse to the actuation direction A, i.e. on the surface, the total cross-sectional surface area defined by each piston 310.1 , 310.2, 310.3 and 330. The total cross-sectional surface areas are in this embodiment provided by the annulus of the annular pistons 310.2 and 310.3 and the circle of the cylindrical pistons 330 and 310.1

[ 66 ] The cross-sectional surface area of the actuator pistons 330, 310.1 , 310.2 and 310.3 increases in that order from the innermost actuator with actuator piston 330 to the outermost actuator with actuator piston 310.3 in the embodiment of figures 3A to 3G. Actuator piston 330 is the innermost piston as compared to actuator piston 310.1 since the latter has a larger outer diameter, although both are full cylindrical (not annular) actuator pistons. The pistons towards the outside generate an increasingly larger force than pistons towards the inside at a same pressure of the gas. The actual force, generated by the press tool part 300, is determined by the number and combination of the actuator pistons selected to be actuated and by the pressure of the gas applied to the actuator pistons.

[ 67 ] In the embodiment shown, the ratio of the cross-sectional surface areas of actuator pistons 330, 310.1 , 310.2 and 310.3 is about 1 : 11 : 140 : 850 by appropriate selection of outer diameters of actuator pistons 330 and 310.1 and appropriate selection of inner and outer diameters of actuator pistons 310.2 and 310.3. The surface area ratios of going from actuator piston 330 with the smallest cross-sectional surface area to the next one to finally actuator piston 310.3 is about 11 : 12 : 6. For the lowest force range only actuator piston 330 is employed, while for the next force range both actuator pistons and 330 and 310.1 are employed. For the subsequent force range actuator pistons 330, 310.1 and 310.2 are employed, while for the highest force range all actuator pistons 330, 310.1 , 310.2 and

310.3 are employed. This provides for four force ranges with relative ratios of about 1 : 12 : 150 : 1000, while the ratios of going from the lowest force range to the next one are about 12 : 12 : 7. Within a force range a force can be set by selecting a fluid pressure in the respective activated actuator cylinder(s). Actuators with respective actuator pistons and actuator cylinders are activated by opening a respective valve to a pressurized fluid source. The pressure in the pressurized fluid source can be set by means known as such. In this fashion a force range of some 20 N to some 20 kN can be covered. To go to the next higher pressure range, the next outer actuator is activated, while the most outer activated actuator is de-activated when going to the next lower pressure range. To obtain a sufficient force range the press tool part preferably comprises at least three actuators, especially for actuators. The total cross-sectional surface areas of the actuator pistons of the plurality of actuators are preferably different with respect to one another by at least a factor 2, especially at least a factor of 4, optionally at least a factor of 6.

[ 68 ] Each actuator piston 310.1 , 310.2, and 310.3 is mechanically connected to at least one movable insert member 320.1 , 320.2, and 320.3, respectively, located at an intermediate position between the associated piston and the component to be processed and protruding from the bottom part 301 .2 of the press tool part 300 toward the component to be processed. When actuated, an actuator piston transfers a force to the associated movable insert member(s) which act(s) upon the component or upon the press plate of the holding tool part.

[ 69 ] The total force generated by the rigid press tool plate 300 and transferred to the component through the movable insert members is the sum of the forces generated by each activated actuator piston. To allow a uniform and homogeneous application of the force onto the component or the press plate, the plurality of movable insert members 320.1 , 320.2, and

320.3 are symmetrically arranged with respect to the center 306 of the press tool part 300.

[ 70 ] Usually, the cross-section surface, along a plane transverse to the direction A, of movable insert members and/or the number of movable insert members are inversely related to the cross-section surface, i.e. the annular surface, of the associated piston. Outermost pistons can be associated with a greater number of movable insert members than innermost pistons. In addition, outermost pistons can be associated with movable insert members having a larger cross-section surface than movable insert members associated with innermost pistons. This prevents a single movable insert member, associated with outer pistons and/or with pistons having a large cross-section surface, from damaging the component or the press plate by exerting an excessive pressure thereupon.

[ 71 ] In the shown press tool part 300, the cross-sectional surface of each movable insert member 320.3 associated with the peripheral piston 310.3 is greater than the cross- section surface of each movable insert member 320.2 associated with the peripheral piston 310.2. Similarly, the cross-section surface of each movable insert member 320.2 is greater than the cross-section surface of each movable insert member 320.1. In addition, the number of movable insert members 320.3 can be greater than the number of movable insert members 320.2 and the number of movable insert members 320.2 can be greater than the number of movable insert members 320.1 .

[ 72 ] To prevent non-activated pistons from moving along the direction A, e.g. as a result of the force of gravity, at least one return piston 311 fixed to the press tool part 300 is associated with each piston 310.1 , 310.2, 310.3. The at least one return piston 311 is configured to block the associated piston at a determined position by pushing the associated piston 310.1 , 310.2, 310.3 away from the component to be processed. When a non-actuated actuator piston is moved away from the component by the return piston(s) 311 , the associated movable insert members follow the non-actuated piston and move away from the component.

[ 73 ] The at least one return piston 311 can move within a cylinder along a direction opposed to A and is actuated by providing a pressurized gas to the respective cylinder through an associated gas inlet 340.2, located on the outer surface of the housing 301 , and conduit 350.2. When actuated, the return piston prevents movable insert members associated with a non-actuated piston from exerting a force onto the component or onto the press plate. The return piston 311 has been described as a pneumatic piston. However, the person skilled in the art will realize that electric actuators, hydraulic pistons movable in cylinders, or other kinds of actuators can be used in the press tool part 300 to block the associated actuator piston in this embodiment and in the other embodiments of this invention.

[ 74 ] The apparatus according to any embodiment of the invention may further comprise a thermostat configured to regulate a temperature of the component and may comprise at least one pressure sensor configured to measure and/or monitor the force exerted onto the component and the sintering material or onto the press plate by the associated actuator 310. The at least one pressure sensor may be associated to each one of the plurality of actuators 310 or may be located in the holding tool part 200.