Title:
COMPOSITE SENSOR FOR MEASUREMENT OF TEMPERATURE AND PRESSURE
Document Type and Number:
WIPO Patent Application WO/2023/182707
Kind Code:
A1
Abstract:
The present invention relates to a composite sensor for measurement of temperature and pressure, which includes a composite sensor unit comprising: a substrate; a temperature sensor layer formed on the substrate; and a pressure sensor layer disposed on the temperature sensor layer.
Inventors:
LEE MYEONG-WON (KR)
KIM BYOUNG-IN (KR)
LEE JIN-KOO (KR)
KIM BYOUNG-IN (KR)
LEE JIN-KOO (KR)
Application Number:
PCT/KR2023/003266
Publication Date:
September 28, 2023
Filing Date:
March 09, 2023
Export Citation:
Assignee:
DONGWOO FINE CHEM CO LTD (KR)
International Classes:
G01D21/02; G01D11/24; G01K1/14; G01L19/00
Foreign References:
US20040159161A1 | 2004-08-19 | |||
KR101682141B1 | 2016-12-02 | |||
KR20060108275A | 2006-10-17 | |||
KR20160140431A | 2016-12-07 | |||
KR20050063097A | 2005-06-28 |
Attorney, Agent or Firm:
HANYANG PATENT FIRM (KR)
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