Title:
COMPOSITE SUBSTRATE AND ACOUSTIC WAVE DEVICE USING SAME
Document Type and Number:
WIPO Patent Application WO/2019/082901
Kind Code:
A1
Abstract:
Provided is a composite substrate comprising a first substrate 10, the first substrate 10 having Euler angles of (0, α, γ) and comprising a lithium tantalate crystal, and a second substrate 20 bonded to the first substrate 10, the second substrate 20 having Euler angles of (-45, -54.7, β) and comprising a silicon monocrystal, wherein α is -40° to -60° or 120° to 140°, γ is 0° or 180°, and either one of the following relationships is satisfied.
(1) β = within γ ± 20° and its equivalent orientations
(2) γ + 160° ≤ β ≤ γ + 200°
Inventors:
ITO MOTOKI (JP)
KISHINO TETSUYA (JP)
NOZOE SOICHIRO (JP)
KISHINO TETSUYA (JP)
NOZOE SOICHIRO (JP)
Application Number:
PCT/JP2018/039380
Publication Date:
May 02, 2019
Filing Date:
October 23, 2018
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H03H9/25; H03H9/145
Domestic Patent References:
| WO2015012005A1 | 2015-01-29 | |||
| WO2017038679A1 | 2017-03-09 | |||
| WO2016104598A1 | 2016-06-30 |
Foreign References:
| JP3187231U | 2013-11-14 |
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