Title:
COMPOSITE SUBSTRATE AND METHOD OF MANUFACTURING COMPOSITE SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2020/044925
Kind Code:
A1
Abstract:
Provided is a composite substrate in which increase in pyroelectric properties due to heat treatment is prevented. This composite substrate includes an oxide single crystal thin film which is a single crystal thin film of a piezoelectric material, a support substrate, and a diffusion preventing layer that is provided between the oxide single crystal thin film and the support substrate and prevents diffusion of oxygen. The diffusion preventing layer preferably comprises any of silicon oxynitride, silicon nitride, silicon oxide, magnesium oxide, spinel, titanium nitride, tantalum, tantalum nitride, tungsten nitride, aluminum oxide, silicon carbide, tungsten boron nitride, titanium silicon nitride, and tungsten silicon nitride.
Inventors:
AKIYAMA SHOJI (JP)
Application Number:
PCT/JP2019/030137
Publication Date:
March 05, 2020
Filing Date:
August 01, 2019
Export Citation:
Assignee:
SHINETSU CHEMICAL CO (JP)
International Classes:
H03H9/25; H01L41/187; H01L41/312; H03H3/08
Domestic Patent References:
| WO2018016169A1 | 2018-01-25 | |||
| WO2018135163A1 | 2018-07-26 | |||
| WO2018151147A1 | 2018-08-23 |
Foreign References:
| JP2004343359A | 2004-12-02 |
Other References:
"Temperature Compensation Technology for SAW-Duplexer Used in RF Front End of Smartphone", DEMPA SHIMBUN HIGH TECHNOLOGY, 8 November 2012 (2012-11-08)
KOBAYASHI: "A study on Temperature-Compensated Hybrid Substrates for Surface Acoustic Wave Filters", 2010 IEEE INTERNATIONAL ULTRASONIC SYMPOSIUM PROCEEDINGS, October 2010 (2010-10-01), pages 637 - 640, XP031952742, DOI: 10.1109/ULTSYM.2010.5935606
YAN: "Formation mechanism of black LiTa0 single crystals through chemical reduction", JOURNAL OF APPLIED CRYSTALLOGRAPHY (2011, vol. 44, no. 1, February 2011 (2011-02-01), pages 158 - 162
See also references of EP 3846343A4
KOBAYASHI: "A study on Temperature-Compensated Hybrid Substrates for Surface Acoustic Wave Filters", 2010 IEEE INTERNATIONAL ULTRASONIC SYMPOSIUM PROCEEDINGS, October 2010 (2010-10-01), pages 637 - 640, XP031952742, DOI: 10.1109/ULTSYM.2010.5935606
YAN: "Formation mechanism of black LiTa0 single crystals through chemical reduction", JOURNAL OF APPLIED CRYSTALLOGRAPHY (2011, vol. 44, no. 1, February 2011 (2011-02-01), pages 158 - 162
See also references of EP 3846343A4
Attorney, Agent or Firm:
ORISAKA Shigeki (JP)
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