Title:
COMPOSITE SUBSTRATE, PIEZOELECTRIC ELEMENT, AND METHOD FOR MANUFACTURING COMPOSITE SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2020/050396
Kind Code:
A1
Abstract:
A composite substrate according to the present disclosure is a composite substrate in which a piezoelectric substrate and a sapphire substrate are directly bonded, wherein a step punch structure is provided on the bonding surface of the sapphire substrate. A piezoelectric element according to the present disclosure is provided with the composite substrate. A method for manufacturing a composite substrate according to the present disclosure is provided with: a preparation step for preparing a piezoelectric substrate and a sapphire substrate provided with a surface having a predetermined off angle with respect to a specific crystal surface; a heat treatment step for heat-treating the sapphire substrate in an oxidizing atmosphere and forming a step punch on the surface of the sapphire substrate; and a bonding step for directly bonding the piezoelectric substrate and the surface of the sapphire substrate.
Inventors:
UMEHARA MOTOHIRO (JP)
MITSUDA KUNIAKI (JP)
MITSUDA KUNIAKI (JP)
Application Number:
PCT/JP2019/035146
Publication Date:
March 12, 2020
Filing Date:
September 06, 2019
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H03H9/25; H03H3/08
Domestic Patent References:
| WO2015001900A1 | 2015-01-08 |
Foreign References:
| JPH0883802A | 1996-03-26 | |||
| JP2002293692A | 2002-10-09 | |||
| JP2008254941A | 2008-10-23 | |||
| JP2014147054A | 2014-08-14 | |||
| JP2018061226A | 2018-04-12 | |||
| JP2005047718A | 2005-02-24 | |||
| JP2004235794A | 2004-08-19 |
Other References:
See also references of EP 3849081A4
Attorney, Agent or Firm:
BUNA PATENT ATTORNEYS (JP)
Download PDF: