Title:
COMPOSITE SUBSTRATE, SURFACE ACOUSTIC WAVE ELEMENT, AND METHOD FOR PRODUCING COMPOSITE SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2022/168498
Kind Code:
A1
Abstract:
The present invention provides a composite substrate which has excellent durability, while confining the energy of elastic waves in a piezoelectric layer. A composite substrate according to one embodiment of the present invention comprises a piezoelectric layer and a reflective layer that is arranged on the back surface of the piezoelectric layer, while comprising a low impedance layer containing silicon oxide and a high impedance layer; a modification layer is formed at an end of the back surface of the piezoelectric layer; and the low impedance layer has a density of 2.15 g/cm3 or more.
Inventors:
YAMAMOTO TAKESHI (JP)
ASAI KEIICHIRO (JP)
FUJITA NAOKI (JP)
ASAI KEIICHIRO (JP)
FUJITA NAOKI (JP)
Application Number:
PCT/JP2021/048175
Publication Date:
August 11, 2022
Filing Date:
December 24, 2021
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
H03H3/08; H03H9/25
Domestic Patent References:
| WO2017188342A1 | 2017-11-02 | |||
| WO2018154950A1 | 2018-08-30 | |||
| WO2012086441A1 | 2012-06-28 |
Foreign References:
| JP2018074430A | 2018-05-10 | |||
| JP2008178071A | 2008-07-31 | |||
| JP2020113954A | 2020-07-27 | |||
| JP2017139720A | 2017-08-10 | |||
| JPH09199978A | 1997-07-31 | |||
| JP2005110230A | 2005-04-21 |
Attorney, Agent or Firm:
MOMII Takafumi (JP)
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