Title:
COMPOSITE SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2013/094665
Kind Code:
A1
Abstract:
Disclosed is a composite substrate, which is provided with an inorganic insulating sintered substrate, which has a heat conductivity of 5 W/m∙K or more, and a volume resistivity of 1×108 Ω∙cm or more, and a single crystal semiconductor film, or a composite substrate, which is provided with the inorganic insulating sintered substrate, a single crystal semiconductor film, and a thin layer configured of at least one kind of material selected from among an oxide, a nitride, and an oxynitride, said thin layer being provided between the inorganic insulating sintered substrate and the single crystal semiconductor film.
According to the present invention, a low-cost composite substrate with suppressed metal impurity contamination can be provided using an inorganic insulating sintered body, which is opaque to visible light, and which has excellent heat conductivity, and furthermore, a small loss in a high frequency region.
Inventors:
KONISHI SHIGERU (JP)
KUBOTA YOSHIHIRO (JP)
KAWAI MAKOTO (JP)
KUBOTA YOSHIHIRO (JP)
KAWAI MAKOTO (JP)
Application Number:
PCT/JP2012/082999
Publication Date:
June 27, 2013
Filing Date:
December 20, 2012
Export Citation:
Assignee:
SHINETSU CHEMICAL CO (JP)
International Classes:
H01L21/02; H01L21/20; H01L27/12
Domestic Patent References:
| WO2009011152A1 | 2009-01-22 |
Foreign References:
| JP2001064080A | 2001-03-13 | |||
| JP2010278160A | 2010-12-09 | |||
| JP2011181907A | 2011-09-15 | |||
| JP2005223304A | 2005-08-18 | |||
| JPH0482256A | 1992-03-16 |
Other References:
See also references of EP 2797107A4
Attorney, Agent or Firm:
KOJIMA TAKASHI (JP)
Takashi Kojima (JP)
Takashi Kojima (JP)
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Claims:
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