Title:
COMPOSITION FOR FORMING THIN FILM AND METHOD OF PRODUCING SEMICONDUCTOR ELEMENT
Document Type and Number:
WIPO Patent Application WO/2024/043213
Kind Code:
A1
Abstract:
The present invention provides a composition which is capable of uniformly forming a thin film that contains a water-soluble cellulose by means of a spin coating method. A composition for forming a thin film according to the present disclosure contains (I) a solvent that has an SP value of 9.8 (cal/cm3)1/2 or more, and (II) a cellulose derivative that has a constituent unit represented by formula (c) or a salt of the cellulose derivative. In the formula, three R moieties may be the same or different and each represent a hydrogen atom, a hydrocarbon group or a group wherein two or more hydrocarbon groups are bonded via a linking group; the hydrocarbon group may have a hydroxyl group or a carboxyl group; and at least one of the three R moieties is a hydrocarbon group or a group wherein two or more hydrocarbon groups are bonded via a linking group.
Inventors:
MOCHIDA KENJI (JP)
MIKI TSUBASA (JP)
MIKI TSUBASA (JP)
Application Number:
PCT/JP2023/030041
Publication Date:
February 29, 2024
Filing Date:
August 21, 2023
Export Citation:
Assignee:
DAICEL CORP (JP)
International Classes:
H01L21/312; G03F7/11; H01L21/306
Foreign References:
| JP2002513172A | 2002-05-08 | |||
| JPH10171101A | 1998-06-26 | |||
| JP2004295120A | 2004-10-21 | |||
| JP2005173574A | 2005-06-30 | |||
| JP2018535538A | 2018-11-29 | |||
| JP2002208573A | 2002-07-26 |
Attorney, Agent or Firm:
G-CHEMICAL INTELLECTUAL PROPERTY FIRM (JP)
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