COMPOSITION, METHOD FOR PRODUCING SUBSTRATE HAVING PATTERN FORMED THEREON, FILM AND METHOD FOR PRODUCING SAME, AND COMPOUND

WIPO Patent Application WO/2014/156910

A1

The present invention is a composition comprising a compound having a partial structure represented by formula (1) and a solvent. In formula (1), X1 and X2 independently represent a substituted or unsubstituted 4- to 10-membered cyclic structure which is constituted along with a spiro carbon atom and a carbon atom in an aromatic ring, n1 and n2 independently represent an integer of 0 to 2, and k1 + k2 independently represent an integer of 1 to 8, wherein the sum total of k1 and k2 (i.e., k1 + k2) is 2 to 16 inclusive, the compound is preferably represented by formula (2), and the sum total of k1 and k2 (i.e., k1 + k2) in formula (1) is preferably 3 or greater.

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NAKAFUJI SHIN-YA (JP)
TOYOKAWA FUMIHIRO (JP)
WAKAMATSU GOUJI (JP)
TAKIMOTO YOSHIO (JP)
MIZOGUCHI KATSUHISA (JP)
OKADA TAKASHI (JP)
UNO TAKAAKI (JP)
ENDO TAKESHI (JP)
MORITSUGU MASAKI (JP)

PCT/JP2014/057626

October 02, 2014

March 19, 2014

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JSR CORP (JP)

C08G65/40; C07C255/51; C07D493/10; G03F7/11; H01L21/027

JP2005128509A	2005-05-19
JP2006058427A	2006-03-02
JPH05140296A	1993-06-08
JPH05339365A	1993-12-21
JP2000159715A	2000-06-13
JP2002356551A	2002-12-13
JP2011526828A	2011-10-20
JPH03162413A	1991-07-12
JPH04233939A	1992-08-21
JPH02247222A	1990-10-03
JP2012519061A	2012-08-23
JPH02276822A	1990-11-13
JP2006063236A	2006-03-09
JPH02199121A	1990-08-07

AMANO KAZUNORI (JP)
Kazuki Amano (JP)

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