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Title:
COMPOUND, PATTERN FORMING SUBSTRATE, COUPLING AGENT, AND PATTERN FORMING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/017386
Kind Code:
A1
Abstract:
Provided are, a compound, a pattern forming substrate, a coupling agent, and a pattern forming method. The compound is represented by general formula (1). [In the formula, X01 is a group representing semiconductor characteristics, and Y is a divalent linking group.]

Inventors:
KAWAKAMI YUSUKE (JP)
YAMAGUCHI KAZUO (JP)
Application Number:
PCT/JP2018/026909
Publication Date:
January 24, 2019
Filing Date:
July 18, 2018
Export Citation:
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Assignee:
NIKON CORP (JP)
UNIV KANAGAWA (JP)
International Classes:
C07D495/04; C07F7/18; G03F7/004; G03F7/075
Domestic Patent References:
WO2012111142A12012-08-23
WO2013042012A12013-03-28
Foreign References:
JP2002275144A2002-09-25
JP2016114716A2016-06-23
JP2017120342A2017-07-06
Other References:
ZHU, JIN ET AL.: "A Surface Modification Approach to the Patterned Assembly of Single-Walled Carbon Nanomaterials", NANO LETTERS, vol. 3, no. 9, 2003, pages 1239 - 1243, XP055573661
MELUCCI, MANUELA ET AL.: "Facile covalent functionalization of graphene oxide using microwaves: bottom-up development of functional graphitic materials", JOURNAL OF MATERIALS CHEMISTRY, vol. 20, no. 41, 2010, pages 9052 - 9060, XP055573873, ISSN: 0959-9428
MELUCCI, MANUELA ET AL.: "Facile tuning from blue to white emission in silica nanoparticles doped with oligothiophene fluorophores", JOURNAL OF MATERIALS CHEMISTRY, vol. 20, no. 44, 2010, pages 9903 - 9909, XP055573900, ISSN: 0959-9428
MELUCCI, MANUELA ET AL.: "Multicolor, large-area fluorescence sensing through oligothiophene-self-assembled monolayers", CHEMICAL COMMUNICATIONS, vol. 47, no. 6, 2011, Cambridge, United Kingdom, pages 1689 - 1691, XP055573983, ISSN: 1359-7345
COSIMELLI, BARBARA ET AL.: "A new synthetic route to 2, 2':5', 2''-terthiophene-5-deri vatives to conjugate with proteins and monoclonal antibodies", TETRAHEDRON, vol. 52, no. 34, 1996, pages 11281 - 11290, XP055573998, ISSN: 0040-4020
KONISHI, TSUBASA ET AL.: "Surface control of a photoresponsive self-assembled monolayer and selective deposition of Ag nanoparticulate ink", BULLETIN OF THE CHEMICAL SOCIETY OF JAPAN, vol. 89, no. 4, 2016, pages 424 - 429, ISSN: 0009-2673
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
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