CONDUCTIVE POLYMER COMPOSITION, COATED ARTICLE WHICH IS PROVIDED WITH ANTISTATIC FILM OBTAINED FROM CONDUCTIVE POLYMER COMPOSITION, AND PATTERN FORMING METHOD USING CONDUCTIVE POLYMER COMPOSITION

Title:

CONDUCTIVE POLYMER COMPOSITION, COATED ARTICLE WHICH IS PROVIDED WITH ANTISTATIC FILM OBTAINED FROM CONDUCTIVE POLYMER COMPOSITION, AND PATTERN FORMING METHOD USING CONDUCTIVE POLYMER COMPOSITION

Document Type and Number:

WIPO Patent Application WO/2014/006821

Kind Code:

A1

Abstract:

The present invention is a conductive polymer composition which is characterized by containing a π-conjugated conductive polymer, a polyanion, and a gemini surfactant. Consequently, there is provided a conductive polymer composition which has excellent antistatic performance and excellent coatability without adversely affecting a resist, and which is suitable for use in lithography wherein an electron beam or the like is used.

Inventors:

SAWAI TOSHIYA (JP)
NAGASAWA TAKAYUKI (JP)
WATANABE SATOSHI (JP)
MASUNAGA KEIICHI (JP)

Application Number:

PCT/JP2013/003561

Publication Date:

January 09, 2014

Filing Date:

June 06, 2013

Export Citation:

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Assignee:

SHINETSU POLYMER CO (JP)
SHINETSU CHEMICAL CO (JP)

International Classes:

C08L45/00; C08K5/16; G03F7/038; G03F7/039; G03F7/11

Foreign References:

JP2008147035A	2008-06-26
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Other References: