Title:
CONTROL METHOD FOR DISCHARGE EXCITATION TYPE LASER DEVICE, DISCHARGE EXCITATION TYPE LASER DEVICE, AND MANUFACTURING METHOD FOR ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/007685
Kind Code:
A1
Abstract:
A control method for a discharge excitation type laser device according to the present invention provided with a power supply that controls pulse energy of a pulsed laser light, the method including: in a first period, outputting pulsed laser light that includes a plurality of pulses from a discharge excitation type laser device while periodically varying the wavelength; calculating correction data that corrects a voltage command value set by the power supply according to the variation in wavelength using first time series data of the pulse energy of the plurality of pulses; and in a second period, acquiring the voltage command value, correcting the acquired voltage command value using the correction data, and outputting pulsed laser light from the discharge excitation type laser device according to the corrected voltage command value.
Inventors:
ISHIDA KEISUKE (JP)
Application Number:
PCT/JP2021/028219
Publication Date:
February 02, 2023
Filing Date:
July 29, 2021
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/136; G03F7/20; H01S3/139
Domestic Patent References:
| WO2020157839A1 | 2020-08-06 |
Foreign References:
| JP2003218437A | 2003-07-31 | |||
| JPH10173274A | 1998-06-26 | |||
| JPH11214782A | 1999-08-06 | |||
| JP2014078765A | 2014-05-01 | |||
| JP2008515230A | 2008-05-08 |
Attorney, Agent or Firm:
HOSAKA Nobuhisa (JP)
Download PDF: