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Title:
CONTROLLED FLUID FLOW FOR CLEANING AN OPTICAL ELEMENT
Document Type and Number:
WIPO Patent Application WO/2017/023950
Kind Code:
A3
Abstract:
A fluid (105) is directed toward a surface (422) of an optical element (420) based on a first flow pattern, the surface of the optical element including debris and the fluid directed based on the first flow pattern moving at least some of the debris to a first stagnation region (425) at the surface of the optical element; and the fluid is directed toward the optical element based on a second flow pattern, the fluid directed based on the second flow pattern moving at least some of the debris to a second stagnation region on the surface of the optical element, the second stagnation region and the first stagnation region being different locations at the surface of the optical element.

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Inventors:
DE DEA SILVIA (US)
XIA CHUNGUANG (US)
WILSON GREGORY JAMES (US)
VERHOFF BRANDON WILSON (US)
Application Number:
PCT/US2016/045200
Publication Date:
March 09, 2017
Filing Date:
August 02, 2016
Export Citation:
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Assignee:
ASML NETHERLANDS BV (NL)
International Classes:
G03F7/20
Domestic Patent References:
WO2015090862A12015-06-25
Foreign References:
US20150069273A12015-03-12
US20110043774A12011-02-24
US20090014666A12009-01-15
Attorney, Agent or Firm:
NGUYEN, Joseph, A. (US)
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