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Patent Searching and Data


Title:
CONTROLLER AND VAPORIZATION SUPPLY DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/209639
Kind Code:
A1
Abstract:
[Problem] To provide a controller for controlling fluid which can improve the loss resistance of a synthetic resin coating of a diaphragm and a vaporization supply device provided with the controller. [Solution] A controller (3) comprising: a body (8) provided with an inflow passage (6) and an outflow passage (7); a valve seat (9) provided between the inflow passage (6) and the outflow passage (7); a diaphragm (10) capable of being seated on or unseated from the valve seat (9); and an actuator (11) that causes the diaphragm (10) to be seated on or unseated from the valve seat (9), wherein the material of the valve seat (9) is nickel-based and the diaphragm (10) is provided with a synthetic resin coating (27) on a surface thereof to be brought into abutment with the valve seat (9).

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Inventors:
HIDAKA ATSUSHI (JP)
TANAKA KAZUTERU (JP)
NAKATANI TAKATOSHI (JP)
MORISAKI KAZUYUKI (JP)
KITANO MASAFUMI (JP)
HIRATA KAORU (JP)
NAGASE MASAAKI (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
Application Number:
PCT/JP2022/010096
Publication Date:
October 06, 2022
Filing Date:
March 08, 2022
Export Citation:
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Assignee:
FUJIKIN KK (JP)
International Classes:
F16K7/12; B01J7/02; F16K7/17
Foreign References:
JP2018025293A2018-02-15
JP2020045917A2020-03-26
JP2004263576A2004-09-24
Attorney, Agent or Firm:
TANIDA Ryuichi et al. (JP)
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