Title:
CONTROLLER AND VAPORIZATION SUPPLY DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/209639
Kind Code:
A1
Abstract:
[Problem] To provide a controller for controlling fluid which can improve the loss resistance of a synthetic resin coating of a diaphragm and a vaporization supply device provided with the controller. [Solution] A controller (3) comprising: a body (8) provided with an inflow passage (6) and an outflow passage (7); a valve seat (9) provided between the inflow passage (6) and the outflow passage (7); a diaphragm (10) capable of being seated on or unseated from the valve seat (9); and an actuator (11) that causes the diaphragm (10) to be seated on or unseated from the valve seat (9), wherein the material of the valve seat (9) is nickel-based and the diaphragm (10) is provided with a synthetic resin coating (27) on a surface thereof to be brought into abutment with the valve seat (9).
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| JPH06137426 | DIAPHRAGM MEMBER AND ITS METHOD OF FABRICATION |
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Inventors:
HIDAKA ATSUSHI (JP)
TANAKA KAZUTERU (JP)
NAKATANI TAKATOSHI (JP)
MORISAKI KAZUYUKI (JP)
KITANO MASAFUMI (JP)
HIRATA KAORU (JP)
NAGASE MASAAKI (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
TANAKA KAZUTERU (JP)
NAKATANI TAKATOSHI (JP)
MORISAKI KAZUYUKI (JP)
KITANO MASAFUMI (JP)
HIRATA KAORU (JP)
NAGASE MASAAKI (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
Application Number:
PCT/JP2022/010096
Publication Date:
October 06, 2022
Filing Date:
March 08, 2022
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
F16K7/12; B01J7/02; F16K7/17
Foreign References:
| JP2018025293A | 2018-02-15 | |||
| JP2020045917A | 2020-03-26 | |||
| JP2004263576A | 2004-09-24 |
Attorney, Agent or Firm:
TANIDA Ryuichi et al. (JP)
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