CONVEXO-CONCAVE MICROSTRUCTURE TRANSCRIPTION TEMPLATE

WIPO Patent Application WO/2013/002048

A1

Provided is a convexo-concave microstructure transcription template that exerts good transfer material coatability and good releasability at the same time. This convexo-concave microstructure transcription template (110) has: a base material; a patterned section (111) where a convexo-concave microstructure, which is to be transferred onto an object to be processed, is formed in a portion of one of the primary surfaces of the base material; a non-patterned section (112) where the convexo-concave microstructure is not formed and that consists of an area of the one primary surface other than the transfer area; and a barrier area (114) that is provided between the patterned section (111) and the non-patterned section so as to border, at least partially, the patterned section (111). The patterned section (111) and the barrier area (114) contain multiple concave sections. The relationship expressed as Rf1 > Rf2 is established between the average roughness factor (Rf1) of the patterned section (111) and the average roughness factor (Rf2) of barrier area (114), and the relationship expressed as Ar1 > Ar2 is established between the average aperture ratio (Ar1) of the patterned section (111) and the average aperture ratio (Ar2) of the barrier area (114).

KOIKE JUN (JP)

PCT/JP2012/065454

January 03, 2013

June 18, 2012

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ASAHI CHEMICAL IND (JP)
KOIKE JUN (JP)

H01L21/027; B29C33/42; B29C33/44; B29C59/02; B29C59/04

WO2010047769A1

2010-04-29

JP2010225683A	2010-10-07
JP2011116032A	2011-06-16
JP2007125799A	2007-05-24
JP2009070483A	2009-04-02
JP2011168812A	2011-09-01

AOKI, HIROYOSHI (JP)
Hiroyoshi Aoki (JP)

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